7/21/2010	1:16:25 AM	Helium valve opened
7/21/2010	1:38:08 AM	Helium valve closed
7/21/2010	1:38:57 AM	Helium valve opened
7/21/2010	1:47:31 AM	Helium valve closed
7/21/2010	1:48:31 AM	Main Vac valve closed
7/21/2010	1:48:31 AM	Bypass valve closed
7/21/2010	1:49:07 AM	Bypass valve opened
7/21/2010	1:49:08 AM	Main Vac valve opened
7/21/2010	1:50:25 AM	Recipe started at 1:50 AM
7/21/2010	1:50:25 AM	Helium valve closed
7/21/2010	1:50:25 AM	BCl3 valve closed
7/21/2010	1:50:25 AM	PH3 valve closed
7/21/2010	1:50:25 AM	SiCl4 pre valve closed
7/21/2010	1:50:25 AM	SiCl4 post valve closed
7/21/2010	1:50:25 AM	Main Vac valve closed
7/21/2010	1:50:25 AM	Bypass valve closed
7/21/2010	1:50:25 AM	Bubbler valve closed
7/21/2010	1:50:25 AM	H2 valve opened
7/21/2010	1:50:25 AM	Helium MFC set to  0.000000
7/21/2010	1:50:25 AM	H2 MFC set to  500.000000
7/21/2010	1:50:25 AM	BCl3 MFC set to  0.000000
7/21/2010	1:50:25 AM	PHl3 MFC set to  0.000000
7/21/2010	1:50:25 AM	SiCl4 MFC set to  0.000000
7/21/2010	1:50:25 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	1:50:25 AM	Tube furnace set to 0
7/21/2010	1:51:46 AM	Helium valve closed
7/21/2010	1:51:46 AM	BCl3 valve closed
7/21/2010	1:51:46 AM	PH3 valve closed
7/21/2010	1:51:46 AM	SiCl4 pre valve closed
7/21/2010	1:51:46 AM	SiCl4 post valve closed
7/21/2010	1:51:46 AM	Main Vac valve closed
7/21/2010	1:51:46 AM	Bypass valve closed
7/21/2010	1:51:46 AM	H2 valve opened
7/21/2010	1:51:46 AM	Bubbler valve opened
7/21/2010	1:51:46 AM	Helium MFC set to  0.000000
7/21/2010	1:51:46 AM	H2 MFC set to  500.000000
7/21/2010	1:51:46 AM	BCl3 MFC set to  0.000000
7/21/2010	1:51:46 AM	PHl3 MFC set to  0.000000
7/21/2010	1:51:46 AM	SiCl4 MFC set to  0.000000
7/21/2010	1:51:46 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	1:51:46 AM	Tube furnace set to 1000
7/21/2010	2:11:46 AM	Helium valve closed
7/21/2010	2:11:46 AM	BCl3 valve closed
7/21/2010	2:11:46 AM	Main Vac valve closed
7/21/2010	2:11:46 AM	Bypass valve closed
7/21/2010	2:11:46 AM	H2 valve opened
7/21/2010	2:11:46 AM	PH3 valve opened
7/21/2010	2:11:46 AM	SiCl4 pre valve opened
7/21/2010	2:11:46 AM	SiCl4 post valve opened
7/21/2010	2:11:46 AM	Bubbler valve opened
7/21/2010	2:11:46 AM	Helium MFC set to  0.000000
7/21/2010	2:11:46 AM	H2 MFC set to  500.000000
7/21/2010	2:11:46 AM	BCl3 MFC set to  0.000000
7/21/2010	2:11:46 AM	PHl3 MFC set to  1.000000
7/21/2010	2:11:46 AM	SiCl4 MFC set to  50.000000
7/21/2010	2:11:46 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	2:11:46 AM	Tube furnace set to 1000
7/21/2010	2:39:46 AM	H2 valve closed
7/21/2010	2:39:46 AM	BCl3 valve closed
7/21/2010	2:39:46 AM	PH3 valve closed
7/21/2010	2:39:46 AM	SiCl4 pre valve closed
7/21/2010	2:39:46 AM	SiCl4 post valve closed
7/21/2010	2:39:46 AM	Main Vac valve closed
7/21/2010	2:39:46 AM	Bypass valve closed
7/21/2010	2:39:46 AM	Helium valve opened
7/21/2010	2:39:46 AM	Bubbler valve opened
7/21/2010	2:39:46 AM	Helium MFC set to  500.000000
7/21/2010	2:39:46 AM	H2 MFC set to  0.000000
7/21/2010	2:39:46 AM	BCl3 MFC set to  0.000000
7/21/2010	2:39:46 AM	PHl3 MFC set to  0.000000
7/21/2010	2:39:46 AM	SiCl4 MFC set to  0.000000
7/21/2010	2:39:46 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	2:39:46 AM	Tube furnace set to 0
7/21/2010	2:59:46 AM	Helium valve closed
7/21/2010	2:59:46 AM	H2 valve closed
7/21/2010	2:59:46 AM	BCl3 valve closed
7/21/2010	2:59:46 AM	PH3 valve closed
7/21/2010	2:59:46 AM	SiCl4 pre valve closed
7/21/2010	2:59:46 AM	SiCl4 post valve closed
7/21/2010	2:59:46 AM	Main Vac valve closed
7/21/2010	2:59:46 AM	Bypass valve closed
7/21/2010	2:59:46 AM	Bubbler valve closed
7/21/2010	2:59:46 AM	Helium MFC set to  0.000000
7/21/2010	2:59:46 AM	H2 MFC set to  0.000000
7/21/2010	2:59:46 AM	BCl3 MFC set to  0.000000
7/21/2010	2:59:46 AM	PHl3 MFC set to  0.000000
7/21/2010	2:59:46 AM	SiCl4 MFC set to  0.000000
7/21/2010	2:59:46 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	2:59:46 AM	Tube furnace set to 0
7/21/2010	2:59:46 AM	Run finished at 2:59 AM
7/21/2010	3:05:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/21/2010	3:05:45 AM	Recipe started at 3:05 AM
7/21/2010	3:05:45 AM	Helium valve closed
7/21/2010	3:05:45 AM	H2 valve closed
7/21/2010	3:05:45 AM	BCl3 valve closed
7/21/2010	3:05:45 AM	PH3 valve closed
7/21/2010	3:05:45 AM	SiCl4 pre valve closed
7/21/2010	3:05:45 AM	SiCl4 post valve closed
7/21/2010	3:05:45 AM	Main Vac valve closed
7/21/2010	3:05:45 AM	Bubbler valve closed
7/21/2010	3:05:45 AM	Bypass valve opened
7/21/2010	3:05:45 AM	Helium MFC set to  0.000000
7/21/2010	3:05:45 AM	H2 MFC set to  0.000000
7/21/2010	3:05:45 AM	BCl3 MFC set to  0.000000
7/21/2010	3:05:45 AM	PHl3 MFC set to  0.000000
7/21/2010	3:05:45 AM	SiCl4 MFC set to  0.000000
7/21/2010	3:05:45 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:05:45 AM	Tube furnace set to 0
7/21/2010	3:06:20 AM	Helium valve closed
7/21/2010	3:06:20 AM	H2 valve closed
7/21/2010	3:06:20 AM	BCl3 valve closed
7/21/2010	3:06:20 AM	PH3 valve closed
7/21/2010	3:06:20 AM	SiCl4 pre valve closed
7/21/2010	3:06:20 AM	SiCl4 post valve closed
7/21/2010	3:06:20 AM	Bubbler valve closed
7/21/2010	3:06:20 AM	Main Vac valve opened
7/21/2010	3:06:20 AM	Bypass valve opened
7/21/2010	3:06:20 AM	Helium MFC set to  0.000000
7/21/2010	3:06:20 AM	H2 MFC set to  0.000000
7/21/2010	3:06:20 AM	BCl3 MFC set to  0.000000
7/21/2010	3:06:20 AM	PHl3 MFC set to  0.000000
7/21/2010	3:06:20 AM	SiCl4 MFC set to  0.000000
7/21/2010	3:06:20 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:06:20 AM	Tube furnace set to 0
7/21/2010	3:06:20 AM	Run finished at 3:06 AM
7/21/2010	3:06:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/21/2010	3:06:41 AM	Helium MFC set to  100.000000
7/21/2010	3:06:44 AM	Helium valve opened
7/21/2010	3:18:46 AM	Helium valve closed
7/21/2010	3:18:55 AM	Helium MFC set to  0.000000
7/21/2010	4:31:02 AM	Helium MFC set to  100.000000
7/21/2010	4:31:04 AM	Helium valve opened
7/21/2010	4:48:46 AM	Helium valve closed
7/21/2010	4:48:50 AM	Helium MFC set to  0.000000
7/21/2010	4:50:29 AM	Main Vac valve closed
7/21/2010	4:50:29 AM	Bypass valve closed
7/21/2010	4:50:45 AM	Bypass valve opened
7/21/2010	4:50:46 AM	Main Vac valve opened
7/21/2010	4:51:41 AM	Recipe started at 4:51 AM
7/21/2010	4:51:41 AM	Helium valve closed
7/21/2010	4:51:41 AM	BCl3 valve closed
7/21/2010	4:51:41 AM	PH3 valve closed
7/21/2010	4:51:41 AM	SiCl4 pre valve closed
7/21/2010	4:51:41 AM	SiCl4 post valve closed
7/21/2010	4:51:41 AM	Main Vac valve closed
7/21/2010	4:51:41 AM	Bypass valve closed
7/21/2010	4:51:41 AM	Bubbler valve closed
7/21/2010	4:51:41 AM	H2 valve opened
7/21/2010	4:51:41 AM	Helium MFC set to  0.000000
7/21/2010	4:51:41 AM	H2 MFC set to  500.000000
7/21/2010	4:51:41 AM	BCl3 MFC set to  0.000000
7/21/2010	4:51:41 AM	PHl3 MFC set to  0.000000
7/21/2010	4:51:41 AM	SiCl4 MFC set to  0.000000
7/21/2010	4:51:41 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	4:51:41 AM	Tube furnace set to 0
7/21/2010	4:53:01 AM	Helium valve closed
7/21/2010	4:53:01 AM	BCl3 valve closed
7/21/2010	4:53:01 AM	PH3 valve closed
7/21/2010	4:53:01 AM	SiCl4 pre valve closed
7/21/2010	4:53:01 AM	SiCl4 post valve closed
7/21/2010	4:53:01 AM	Main Vac valve closed
7/21/2010	4:53:01 AM	Bypass valve closed
7/21/2010	4:53:01 AM	H2 valve opened
7/21/2010	4:53:01 AM	Bubbler valve opened
7/21/2010	4:53:01 AM	Helium MFC set to  0.000000
7/21/2010	4:53:01 AM	H2 MFC set to  500.000000
7/21/2010	4:53:01 AM	BCl3 MFC set to  0.000000
7/21/2010	4:53:01 AM	PHl3 MFC set to  0.000000
7/21/2010	4:53:01 AM	SiCl4 MFC set to  0.000000
7/21/2010	4:53:01 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	4:53:01 AM	Tube furnace set to 1000
7/21/2010	5:13:01 AM	Helium valve closed
7/21/2010	5:13:01 AM	BCl3 valve closed
7/21/2010	5:13:01 AM	Main Vac valve closed
7/21/2010	5:13:01 AM	Bypass valve closed
7/21/2010	5:13:01 AM	H2 valve opened
7/21/2010	5:13:01 AM	PH3 valve opened
7/21/2010	5:13:01 AM	SiCl4 pre valve opened
7/21/2010	5:13:01 AM	SiCl4 post valve opened
7/21/2010	5:13:01 AM	Bubbler valve opened
7/21/2010	5:13:01 AM	Helium MFC set to  0.000000
7/21/2010	5:13:01 AM	H2 MFC set to  500.000000
7/21/2010	5:13:01 AM	BCl3 MFC set to  0.000000
7/21/2010	5:13:01 AM	PHl3 MFC set to  1.000000
7/21/2010	5:13:01 AM	SiCl4 MFC set to  50.000000
7/21/2010	5:13:01 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:13:01 AM	Tube furnace set to 1000
7/21/2010	5:46:01 AM	H2 valve closed
7/21/2010	5:46:01 AM	BCl3 valve closed
7/21/2010	5:46:01 AM	PH3 valve closed
7/21/2010	5:46:01 AM	SiCl4 pre valve closed
7/21/2010	5:46:01 AM	SiCl4 post valve closed
7/21/2010	5:46:01 AM	Main Vac valve closed
7/21/2010	5:46:01 AM	Bypass valve closed
7/21/2010	5:46:01 AM	Helium valve opened
7/21/2010	5:46:01 AM	Bubbler valve opened
7/21/2010	5:46:01 AM	Helium MFC set to  500.000000
7/21/2010	5:46:01 AM	H2 MFC set to  0.000000
7/21/2010	5:46:01 AM	BCl3 MFC set to  0.000000
7/21/2010	5:46:01 AM	PHl3 MFC set to  0.000000
7/21/2010	5:46:01 AM	SiCl4 MFC set to  0.000000
7/21/2010	5:46:01 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:46:01 AM	Tube furnace set to 0
7/21/2010	6:00:45 AM	Run aborted at 6:00 AM
7/21/2010	6:00:45 AM	Helium valve closed
7/21/2010	6:00:45 AM	H2 valve closed
7/21/2010	6:00:45 AM	BCl3 valve closed
7/21/2010	6:00:45 AM	PH3 valve closed
7/21/2010	6:00:45 AM	SiCl4 pre valve closed
7/21/2010	6:00:45 AM	SiCl4 post valve closed
7/21/2010	6:00:45 AM	Bypass valve closed
7/21/2010	6:00:45 AM	Main Vac valve closed
7/21/2010	6:00:45 AM	Bubbler valve closed
7/21/2010	6:00:45 AM	Helium MFC set to  0.000000
7/21/2010	6:00:45 AM	H2 MFC set to  0.000000
7/21/2010	6:00:45 AM	BCl3 MFC set to  0.000000
7/21/2010	6:00:45 AM	PHl3 MFC set to  0.000000
7/21/2010	6:00:45 AM	SiCl4 MFC set to  0.000000
7/21/2010	6:00:45 AM	Tube furnace set to 0
7/21/2010	6:07:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/21/2010	6:07:35 AM	Recipe started at 6:07 AM
7/21/2010	6:07:35 AM	Helium valve closed
7/21/2010	6:07:35 AM	H2 valve closed
7/21/2010	6:07:35 AM	BCl3 valve closed
7/21/2010	6:07:35 AM	PH3 valve closed
7/21/2010	6:07:35 AM	SiCl4 pre valve closed
7/21/2010	6:07:35 AM	SiCl4 post valve closed
7/21/2010	6:07:35 AM	Main Vac valve closed
7/21/2010	6:07:35 AM	Bubbler valve closed
7/21/2010	6:07:35 AM	Bypass valve opened
7/21/2010	6:07:35 AM	Helium MFC set to  0.000000
7/21/2010	6:07:35 AM	H2 MFC set to  0.000000
7/21/2010	6:07:35 AM	BCl3 MFC set to  0.000000
7/21/2010	6:07:35 AM	PHl3 MFC set to  0.000000
7/21/2010	6:07:35 AM	SiCl4 MFC set to  0.000000
7/21/2010	6:07:35 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	6:07:35 AM	Tube furnace set to 0
7/21/2010	6:08:12 AM	Helium valve closed
7/21/2010	6:08:12 AM	H2 valve closed
7/21/2010	6:08:12 AM	BCl3 valve closed
7/21/2010	6:08:12 AM	PH3 valve closed
7/21/2010	6:08:12 AM	SiCl4 pre valve closed
7/21/2010	6:08:12 AM	SiCl4 post valve closed
7/21/2010	6:08:12 AM	Bubbler valve closed
7/21/2010	6:08:12 AM	Main Vac valve opened
7/21/2010	6:08:12 AM	Bypass valve opened
7/21/2010	6:08:12 AM	Helium MFC set to  0.000000
7/21/2010	6:08:12 AM	H2 MFC set to  0.000000
7/21/2010	6:08:12 AM	BCl3 MFC set to  0.000000
7/21/2010	6:08:12 AM	PHl3 MFC set to  0.000000
7/21/2010	6:08:12 AM	SiCl4 MFC set to  0.000000
7/21/2010	6:08:12 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	6:08:12 AM	Tube furnace set to 0
7/21/2010	6:08:12 AM	Run finished at 6:08 AM
7/21/2010	6:08:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/21/2010	10:17:29 AM	Program started after a nonstandard shutdown
7/21/2010	10:17:30 AM	Helium valve closed
7/21/2010	10:17:30 AM	H2 valve closed
7/21/2010	10:17:30 AM	BCl3 valve closed
7/21/2010	10:17:30 AM	PH3 valve closed
7/21/2010	10:17:30 AM	SiCl4 pre valve closed
7/21/2010	10:17:30 AM	SiCl4 post valve closed
7/21/2010	10:17:30 AM	Main Vac valve closed
7/21/2010	10:17:30 AM	Bypass valve closed
7/21/2010	10:17:30 AM	Bubbler valve closed
7/21/2010	10:17:30 AM	Helium MFC set to  0.000000
7/21/2010	10:17:30 AM	H2 MFC set to  0.000000
7/21/2010	10:17:30 AM	BCl3 MFC set to  0.000000
7/21/2010	10:17:30 AM	PHl3 MFC set to  0.000000
7/21/2010	10:17:30 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:17:30 AM	Bypass solenoid MFC set to  760.000000
7/21/2010	10:17:30 AM	Tube furnace set to 0
7/21/2010	10:17:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/21/2010	10:17:52 AM	Recipe started at 10:17 AM
7/21/2010	10:17:52 AM	Helium valve closed
7/21/2010	10:17:52 AM	H2 valve closed
7/21/2010	10:17:52 AM	BCl3 valve closed
7/21/2010	10:17:52 AM	PH3 valve closed
7/21/2010	10:17:52 AM	SiCl4 pre valve closed
7/21/2010	10:17:52 AM	SiCl4 post valve closed
7/21/2010	10:17:52 AM	Main Vac valve closed
7/21/2010	10:17:52 AM	Bubbler valve closed
7/21/2010	10:17:52 AM	Bypass valve opened
7/21/2010	10:17:52 AM	Helium MFC set to  0.000000
7/21/2010	10:17:52 AM	H2 MFC set to  0.000000
7/21/2010	10:17:52 AM	BCl3 MFC set to  0.000000
7/21/2010	10:17:52 AM	PHl3 MFC set to  0.000000
7/21/2010	10:17:52 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:17:52 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:17:52 AM	Tube furnace set to 0
7/21/2010	10:18:38 AM	Helium valve closed
7/21/2010	10:18:38 AM	H2 valve closed
7/21/2010	10:18:38 AM	BCl3 valve closed
7/21/2010	10:18:38 AM	PH3 valve closed
7/21/2010	10:18:38 AM	SiCl4 pre valve closed
7/21/2010	10:18:38 AM	SiCl4 post valve closed
7/21/2010	10:18:38 AM	Bubbler valve closed
7/21/2010	10:18:38 AM	Main Vac valve opened
7/21/2010	10:18:38 AM	Bypass valve opened
7/21/2010	10:18:38 AM	Helium MFC set to  0.000000
7/21/2010	10:18:38 AM	H2 MFC set to  0.000000
7/21/2010	10:18:38 AM	BCl3 MFC set to  0.000000
7/21/2010	10:18:38 AM	PHl3 MFC set to  0.000000
7/21/2010	10:18:38 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:18:38 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:18:39 AM	Tube furnace set to 0
7/21/2010	10:18:39 AM	Run finished at 10:18 AM
7/21/2010	10:18:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/21/2010	10:19:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/21/2010	10:20:02 AM	Recipe started at 10:20 AM
7/21/2010	10:20:02 AM	H2 valve closed
7/21/2010	10:20:02 AM	BCl3 valve closed
7/21/2010	10:20:02 AM	PH3 valve closed
7/21/2010	10:20:02 AM	SiCl4 pre valve closed
7/21/2010	10:20:02 AM	SiCl4 post valve closed
7/21/2010	10:20:02 AM	Main Vac valve closed
7/21/2010	10:20:02 AM	Bypass valve closed
7/21/2010	10:20:02 AM	Bubbler valve closed
7/21/2010	10:20:02 AM	Helium valve opened
7/21/2010	10:20:02 AM	Helium MFC set to  500.000000
7/21/2010	10:20:02 AM	H2 MFC set to  0.000000
7/21/2010	10:20:02 AM	BCl3 MFC set to  0.000000
7/21/2010	10:20:02 AM	PHl3 MFC set to  0.000000
7/21/2010	10:20:02 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:20:02 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:20:02 AM	Tube furnace set to 0
7/21/2010	10:21:24 AM	Helium valve closed
7/21/2010	10:21:24 AM	H2 valve closed
7/21/2010	10:21:24 AM	BCl3 valve closed
7/21/2010	10:21:24 AM	PH3 valve closed
7/21/2010	10:21:24 AM	SiCl4 pre valve closed
7/21/2010	10:21:24 AM	SiCl4 post valve closed
7/21/2010	10:21:24 AM	Main Vac valve closed
7/21/2010	10:21:24 AM	Bypass valve closed
7/21/2010	10:21:24 AM	Bubbler valve closed
7/21/2010	10:21:24 AM	Helium MFC set to  0.000000
7/21/2010	10:21:24 AM	H2 MFC set to  0.000000
7/21/2010	10:21:24 AM	BCl3 MFC set to  0.000000
7/21/2010	10:21:24 AM	PHl3 MFC set to  0.000000
7/21/2010	10:21:24 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:21:24 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:21:24 AM	Tube furnace set to 0
7/21/2010	10:21:39 AM	Helium valve closed
7/21/2010	10:21:39 AM	H2 valve closed
7/21/2010	10:21:39 AM	BCl3 valve closed
7/21/2010	10:21:39 AM	PH3 valve closed
7/21/2010	10:21:39 AM	SiCl4 pre valve closed
7/21/2010	10:21:39 AM	SiCl4 post valve closed
7/21/2010	10:21:39 AM	Main Vac valve closed
7/21/2010	10:21:39 AM	Bubbler valve closed
7/21/2010	10:21:39 AM	Bypass valve opened
7/21/2010	10:21:39 AM	Helium MFC set to  0.000000
7/21/2010	10:21:39 AM	H2 MFC set to  0.000000
7/21/2010	10:21:39 AM	BCl3 MFC set to  0.000000
7/21/2010	10:21:39 AM	PHl3 MFC set to  0.000000
7/21/2010	10:21:39 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:21:39 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:21:39 AM	Tube furnace set to 0
7/21/2010	10:22:05 AM	Helium valve closed
7/21/2010	10:22:05 AM	H2 valve closed
7/21/2010	10:22:05 AM	BCl3 valve closed
7/21/2010	10:22:05 AM	PH3 valve closed
7/21/2010	10:22:05 AM	SiCl4 pre valve closed
7/21/2010	10:22:05 AM	SiCl4 post valve closed
7/21/2010	10:22:05 AM	Bubbler valve closed
7/21/2010	10:22:05 AM	Main Vac valve opened
7/21/2010	10:22:05 AM	Bypass valve opened
7/21/2010	10:22:05 AM	Helium MFC set to  0.000000
7/21/2010	10:22:05 AM	H2 MFC set to  0.000000
7/21/2010	10:22:05 AM	BCl3 MFC set to  0.000000
7/21/2010	10:22:05 AM	PHl3 MFC set to  0.000000
7/21/2010	10:22:05 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:22:05 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:22:05 AM	Tube furnace set to 0
7/21/2010	10:27:05 AM	H2 valve closed
7/21/2010	10:27:05 AM	BCl3 valve closed
7/21/2010	10:27:05 AM	PH3 valve closed
7/21/2010	10:27:05 AM	SiCl4 pre valve closed
7/21/2010	10:27:05 AM	SiCl4 post valve closed
7/21/2010	10:27:05 AM	Main Vac valve closed
7/21/2010	10:27:05 AM	Bypass valve closed
7/21/2010	10:27:05 AM	Bubbler valve closed
7/21/2010	10:27:05 AM	Helium valve opened
7/21/2010	10:27:05 AM	Helium MFC set to  500.000000
7/21/2010	10:27:05 AM	H2 MFC set to  0.000000
7/21/2010	10:27:05 AM	BCl3 MFC set to  0.000000
7/21/2010	10:27:05 AM	PHl3 MFC set to  0.000000
7/21/2010	10:27:05 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:27:05 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:27:05 AM	Tube furnace set to 0
7/21/2010	10:28:27 AM	Helium valve closed
7/21/2010	10:28:27 AM	H2 valve closed
7/21/2010	10:28:27 AM	BCl3 valve closed
7/21/2010	10:28:27 AM	PH3 valve closed
7/21/2010	10:28:27 AM	SiCl4 pre valve closed
7/21/2010	10:28:27 AM	SiCl4 post valve closed
7/21/2010	10:28:27 AM	Main Vac valve closed
7/21/2010	10:28:27 AM	Bypass valve closed
7/21/2010	10:28:27 AM	Bubbler valve closed
7/21/2010	10:28:27 AM	Helium MFC set to  0.000000
7/21/2010	10:28:27 AM	H2 MFC set to  0.000000
7/21/2010	10:28:27 AM	BCl3 MFC set to  0.000000
7/21/2010	10:28:27 AM	PHl3 MFC set to  0.000000
7/21/2010	10:28:27 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:28:27 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:28:27 AM	Tube furnace set to 0
7/21/2010	10:28:42 AM	Helium valve closed
7/21/2010	10:28:42 AM	H2 valve closed
7/21/2010	10:28:42 AM	BCl3 valve closed
7/21/2010	10:28:42 AM	PH3 valve closed
7/21/2010	10:28:42 AM	SiCl4 pre valve closed
7/21/2010	10:28:42 AM	SiCl4 post valve closed
7/21/2010	10:28:42 AM	Main Vac valve closed
7/21/2010	10:28:42 AM	Bubbler valve closed
7/21/2010	10:28:42 AM	Bypass valve opened
7/21/2010	10:28:42 AM	Helium MFC set to  0.000000
7/21/2010	10:28:42 AM	H2 MFC set to  0.000000
7/21/2010	10:28:42 AM	BCl3 MFC set to  0.000000
7/21/2010	10:28:42 AM	PHl3 MFC set to  0.000000
7/21/2010	10:28:42 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:28:42 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:28:42 AM	Tube furnace set to 0
7/21/2010	10:29:08 AM	Helium valve closed
7/21/2010	10:29:08 AM	H2 valve closed
7/21/2010	10:29:08 AM	BCl3 valve closed
7/21/2010	10:29:08 AM	PH3 valve closed
7/21/2010	10:29:08 AM	SiCl4 pre valve closed
7/21/2010	10:29:08 AM	SiCl4 post valve closed
7/21/2010	10:29:08 AM	Bubbler valve closed
7/21/2010	10:29:08 AM	Main Vac valve opened
7/21/2010	10:29:08 AM	Bypass valve opened
7/21/2010	10:29:08 AM	Helium MFC set to  0.000000
7/21/2010	10:29:08 AM	H2 MFC set to  0.000000
7/21/2010	10:29:08 AM	BCl3 MFC set to  0.000000
7/21/2010	10:29:08 AM	PHl3 MFC set to  0.000000
7/21/2010	10:29:08 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:29:08 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:29:08 AM	Tube furnace set to 0
7/21/2010	10:34:08 AM	H2 valve closed
7/21/2010	10:34:08 AM	BCl3 valve closed
7/21/2010	10:34:08 AM	PH3 valve closed
7/21/2010	10:34:08 AM	SiCl4 pre valve closed
7/21/2010	10:34:08 AM	SiCl4 post valve closed
7/21/2010	10:34:08 AM	Main Vac valve closed
7/21/2010	10:34:08 AM	Bypass valve closed
7/21/2010	10:34:08 AM	Bubbler valve closed
7/21/2010	10:34:08 AM	Helium valve opened
7/21/2010	10:34:08 AM	Helium MFC set to  500.000000
7/21/2010	10:34:08 AM	H2 MFC set to  0.000000
7/21/2010	10:34:08 AM	BCl3 MFC set to  0.000000
7/21/2010	10:34:08 AM	PHl3 MFC set to  0.000000
7/21/2010	10:34:08 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:34:08 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:34:08 AM	Tube furnace set to 0
7/21/2010	10:35:30 AM	Helium valve closed
7/21/2010	10:35:30 AM	H2 valve closed
7/21/2010	10:35:30 AM	BCl3 valve closed
7/21/2010	10:35:30 AM	PH3 valve closed
7/21/2010	10:35:30 AM	SiCl4 pre valve closed
7/21/2010	10:35:30 AM	SiCl4 post valve closed
7/21/2010	10:35:30 AM	Main Vac valve closed
7/21/2010	10:35:30 AM	Bypass valve closed
7/21/2010	10:35:30 AM	Bubbler valve closed
7/21/2010	10:35:30 AM	Helium MFC set to  0.000000
7/21/2010	10:35:30 AM	H2 MFC set to  0.000000
7/21/2010	10:35:30 AM	BCl3 MFC set to  0.000000
7/21/2010	10:35:30 AM	PHl3 MFC set to  0.000000
7/21/2010	10:35:30 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:35:30 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:35:30 AM	Tube furnace set to 0
7/21/2010	10:35:45 AM	Helium valve closed
7/21/2010	10:35:45 AM	H2 valve closed
7/21/2010	10:35:45 AM	BCl3 valve closed
7/21/2010	10:35:45 AM	PH3 valve closed
7/21/2010	10:35:45 AM	SiCl4 pre valve closed
7/21/2010	10:35:45 AM	SiCl4 post valve closed
7/21/2010	10:35:45 AM	Main Vac valve closed
7/21/2010	10:35:45 AM	Bubbler valve closed
7/21/2010	10:35:45 AM	Bypass valve opened
7/21/2010	10:35:45 AM	Helium MFC set to  0.000000
7/21/2010	10:35:45 AM	H2 MFC set to  0.000000
7/21/2010	10:35:45 AM	BCl3 MFC set to  0.000000
7/21/2010	10:35:45 AM	PHl3 MFC set to  0.000000
7/21/2010	10:35:45 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:35:45 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:35:45 AM	Tube furnace set to 0
7/21/2010	10:36:11 AM	Helium valve closed
7/21/2010	10:36:11 AM	H2 valve closed
7/21/2010	10:36:11 AM	BCl3 valve closed
7/21/2010	10:36:11 AM	PH3 valve closed
7/21/2010	10:36:11 AM	SiCl4 pre valve closed
7/21/2010	10:36:11 AM	SiCl4 post valve closed
7/21/2010	10:36:11 AM	Bubbler valve closed
7/21/2010	10:36:11 AM	Main Vac valve opened
7/21/2010	10:36:11 AM	Bypass valve opened
7/21/2010	10:36:11 AM	Helium MFC set to  0.000000
7/21/2010	10:36:11 AM	H2 MFC set to  0.000000
7/21/2010	10:36:11 AM	BCl3 MFC set to  0.000000
7/21/2010	10:36:11 AM	PHl3 MFC set to  0.000000
7/21/2010	10:36:11 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:36:11 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:36:11 AM	Tube furnace set to 0
7/21/2010	10:41:11 AM	Helium valve closed
7/21/2010	10:41:11 AM	H2 valve closed
7/21/2010	10:41:11 AM	BCl3 valve closed
7/21/2010	10:41:11 AM	PH3 valve closed
7/21/2010	10:41:11 AM	SiCl4 pre valve closed
7/21/2010	10:41:11 AM	SiCl4 post valve closed
7/21/2010	10:41:11 AM	Bubbler valve closed
7/21/2010	10:41:11 AM	Main Vac valve opened
7/21/2010	10:41:11 AM	Bypass valve opened
7/21/2010	10:41:11 AM	Helium MFC set to  0.000000
7/21/2010	10:41:11 AM	H2 MFC set to  0.000000
7/21/2010	10:41:11 AM	BCl3 MFC set to  0.000000
7/21/2010	10:41:11 AM	PHl3 MFC set to  0.000000
7/21/2010	10:41:11 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:41:11 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:41:12 AM	Tube furnace set to 0
7/21/2010	10:41:13 AM	Run finished at 10:41 AM
7/21/2010	10:41:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/21/2010	10:43:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/21/2010	10:43:16 AM	Recipe started at 10:43 AM
7/21/2010	10:43:16 AM	Helium valve closed
7/21/2010	10:43:16 AM	H2 valve closed
7/21/2010	10:43:16 AM	BCl3 valve closed
7/21/2010	10:43:16 AM	PH3 valve closed
7/21/2010	10:43:16 AM	SiCl4 pre valve closed
7/21/2010	10:43:16 AM	SiCl4 post valve closed
7/21/2010	10:43:16 AM	Main Vac valve closed
7/21/2010	10:43:16 AM	Bubbler valve closed
7/21/2010	10:43:16 AM	Bypass valve opened
7/21/2010	10:43:16 AM	Helium MFC set to  0.000000
7/21/2010	10:43:16 AM	H2 MFC set to  0.000000
7/21/2010	10:43:16 AM	BCl3 MFC set to  0.000000
7/21/2010	10:43:16 AM	PHl3 MFC set to  0.000000
7/21/2010	10:43:16 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:43:16 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:43:16 AM	Tube furnace set to 0
7/21/2010	10:43:16 AM	Helium valve closed
7/21/2010	10:43:16 AM	H2 valve closed
7/21/2010	10:43:16 AM	BCl3 valve closed
7/21/2010	10:43:16 AM	PH3 valve closed
7/21/2010	10:43:16 AM	SiCl4 pre valve closed
7/21/2010	10:43:16 AM	SiCl4 post valve closed
7/21/2010	10:43:16 AM	Bubbler valve closed
7/21/2010	10:43:16 AM	Main Vac valve opened
7/21/2010	10:43:16 AM	Bypass valve opened
7/21/2010	10:43:16 AM	Helium MFC set to  0.000000
7/21/2010	10:43:16 AM	H2 MFC set to  0.000000
7/21/2010	10:43:16 AM	BCl3 MFC set to  0.000000
7/21/2010	10:43:16 AM	PHl3 MFC set to  0.000000
7/21/2010	10:43:16 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:43:16 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:43:17 AM	Tube furnace set to 0
7/21/2010	10:44:17 AM	H2 valve closed
7/21/2010	10:44:17 AM	BCl3 valve closed
7/21/2010	10:44:17 AM	PH3 valve closed
7/21/2010	10:44:17 AM	SiCl4 pre valve closed
7/21/2010	10:44:17 AM	SiCl4 post valve closed
7/21/2010	10:44:17 AM	Bubbler valve closed
7/21/2010	10:44:17 AM	Helium valve opened
7/21/2010	10:44:17 AM	Main Vac valve opened
7/21/2010	10:44:17 AM	Bypass valve opened
7/21/2010	10:44:17 AM	Helium MFC set to  100.000000
7/21/2010	10:44:17 AM	H2 MFC set to  0.000000
7/21/2010	10:44:17 AM	BCl3 MFC set to  0.000000
7/21/2010	10:44:17 AM	PHl3 MFC set to  0.000000
7/21/2010	10:44:17 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:44:17 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:44:17 AM	Tube furnace set to 0
7/21/2010	10:53:17 AM	Helium valve closed
7/21/2010	10:53:17 AM	H2 valve closed
7/21/2010	10:53:17 AM	BCl3 valve closed
7/21/2010	10:53:17 AM	PH3 valve closed
7/21/2010	10:53:17 AM	SiCl4 pre valve closed
7/21/2010	10:53:17 AM	SiCl4 post valve closed
7/21/2010	10:53:17 AM	Bubbler valve closed
7/21/2010	10:53:17 AM	Main Vac valve opened
7/21/2010	10:53:17 AM	Bypass valve opened
7/21/2010	10:53:17 AM	Helium MFC set to  0.000000
7/21/2010	10:53:17 AM	H2 MFC set to  0.000000
7/21/2010	10:53:17 AM	BCl3 MFC set to  0.000000
7/21/2010	10:53:17 AM	PHl3 MFC set to  0.000000
7/21/2010	10:53:17 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:53:17 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:53:17 AM	Tube furnace set to 0
7/21/2010	10:54:17 AM	H2 valve closed
7/21/2010	10:54:17 AM	BCl3 valve closed
7/21/2010	10:54:17 AM	PH3 valve closed
7/21/2010	10:54:17 AM	SiCl4 pre valve closed
7/21/2010	10:54:17 AM	SiCl4 post valve closed
7/21/2010	10:54:17 AM	Bubbler valve closed
7/21/2010	10:54:17 AM	Helium valve opened
7/21/2010	10:54:17 AM	Main Vac valve opened
7/21/2010	10:54:17 AM	Bypass valve opened
7/21/2010	10:54:17 AM	Helium MFC set to  100.000000
7/21/2010	10:54:17 AM	H2 MFC set to  0.000000
7/21/2010	10:54:17 AM	BCl3 MFC set to  0.000000
7/21/2010	10:54:17 AM	PHl3 MFC set to  0.000000
7/21/2010	10:54:17 AM	SiCl4 MFC set to  0.000000
7/21/2010	10:54:17 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:54:17 AM	Tube furnace set to 0
7/21/2010	11:03:17 AM	Helium valve closed
7/21/2010	11:03:17 AM	H2 valve closed
7/21/2010	11:03:17 AM	BCl3 valve closed
7/21/2010	11:03:17 AM	PH3 valve closed
7/21/2010	11:03:17 AM	SiCl4 pre valve closed
7/21/2010	11:03:17 AM	SiCl4 post valve closed
7/21/2010	11:03:17 AM	Bubbler valve closed
7/21/2010	11:03:17 AM	Main Vac valve opened
7/21/2010	11:03:17 AM	Bypass valve opened
7/21/2010	11:03:17 AM	Helium MFC set to  0.000000
7/21/2010	11:03:17 AM	H2 MFC set to  0.000000
7/21/2010	11:03:17 AM	BCl3 MFC set to  0.000000
7/21/2010	11:03:17 AM	PHl3 MFC set to  0.000000
7/21/2010	11:03:17 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:03:17 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:03:17 AM	Tube furnace set to 0
7/21/2010	11:04:17 AM	H2 valve closed
7/21/2010	11:04:17 AM	BCl3 valve closed
7/21/2010	11:04:17 AM	PH3 valve closed
7/21/2010	11:04:17 AM	SiCl4 pre valve closed
7/21/2010	11:04:17 AM	SiCl4 post valve closed
7/21/2010	11:04:17 AM	Bubbler valve closed
7/21/2010	11:04:17 AM	Helium valve opened
7/21/2010	11:04:17 AM	Main Vac valve opened
7/21/2010	11:04:17 AM	Bypass valve opened
7/21/2010	11:04:17 AM	Helium MFC set to  100.000000
7/21/2010	11:04:17 AM	H2 MFC set to  0.000000
7/21/2010	11:04:17 AM	BCl3 MFC set to  0.000000
7/21/2010	11:04:17 AM	PHl3 MFC set to  0.000000
7/21/2010	11:04:17 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:04:17 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:04:17 AM	Tube furnace set to 0
7/21/2010	11:13:17 AM	Helium valve closed
7/21/2010	11:13:17 AM	H2 valve closed
7/21/2010	11:13:17 AM	BCl3 valve closed
7/21/2010	11:13:17 AM	PH3 valve closed
7/21/2010	11:13:17 AM	SiCl4 pre valve closed
7/21/2010	11:13:17 AM	SiCl4 post valve closed
7/21/2010	11:13:17 AM	Bubbler valve closed
7/21/2010	11:13:17 AM	Main Vac valve opened
7/21/2010	11:13:17 AM	Bypass valve opened
7/21/2010	11:13:17 AM	Helium MFC set to  0.000000
7/21/2010	11:13:17 AM	H2 MFC set to  0.000000
7/21/2010	11:13:18 AM	BCl3 MFC set to  0.000000
7/21/2010	11:13:18 AM	PHl3 MFC set to  0.000000
7/21/2010	11:13:18 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:13:18 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:13:18 AM	Tube furnace set to 0
7/21/2010	11:13:19 AM	Run finished at 11:13 AM
7/21/2010	11:13:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/21/2010	11:16:49 AM	Bypass valve closed
7/21/2010	11:16:50 AM	Main Vac valve closed
7/21/2010	11:17:01 AM	Bypass valve opened
7/21/2010	11:17:02 AM	Main Vac valve opened
7/21/2010	11:17:17 AM	Bypass valve closed
7/21/2010	11:17:17 AM	Main Vac valve closed
7/21/2010	11:18:07 AM	Main Vac valve opened
7/21/2010	11:18:08 AM	Bypass valve opened
7/21/2010	11:18:26 AM	Bypass valve closed
7/21/2010	11:18:27 AM	Main Vac valve closed
7/21/2010	11:18:58 AM	Bypass valve opened
7/21/2010	11:18:58 AM	Main Vac valve opened
7/21/2010	11:19:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/21/2010	11:19:07 AM	Recipe started at 11:19 AM
7/21/2010	11:19:07 AM	H2 valve closed
7/21/2010	11:19:07 AM	BCl3 valve closed
7/21/2010	11:19:07 AM	PH3 valve closed
7/21/2010	11:19:07 AM	SiCl4 pre valve closed
7/21/2010	11:19:07 AM	SiCl4 post valve closed
7/21/2010	11:19:07 AM	Main Vac valve closed
7/21/2010	11:19:07 AM	Bypass valve closed
7/21/2010	11:19:07 AM	Bubbler valve closed
7/21/2010	11:19:07 AM	Helium valve opened
7/21/2010	11:19:07 AM	Helium MFC set to  500.000000
7/21/2010	11:19:07 AM	H2 MFC set to  0.000000
7/21/2010	11:19:07 AM	BCl3 MFC set to  0.000000
7/21/2010	11:19:07 AM	PHl3 MFC set to  0.000000
7/21/2010	11:19:07 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:19:07 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:19:07 AM	Tube furnace set to 0
7/21/2010	11:20:27 AM	Helium valve closed
7/21/2010	11:20:27 AM	H2 valve closed
7/21/2010	11:20:27 AM	BCl3 valve closed
7/21/2010	11:20:27 AM	PH3 valve closed
7/21/2010	11:20:27 AM	SiCl4 pre valve closed
7/21/2010	11:20:27 AM	SiCl4 post valve closed
7/21/2010	11:20:27 AM	Main Vac valve closed
7/21/2010	11:20:27 AM	Bypass valve closed
7/21/2010	11:20:27 AM	Bubbler valve closed
7/21/2010	11:20:27 AM	Helium MFC set to  0.000000
7/21/2010	11:20:27 AM	H2 MFC set to  0.000000
7/21/2010	11:20:27 AM	BCl3 MFC set to  0.000000
7/21/2010	11:20:27 AM	PHl3 MFC set to  0.000000
7/21/2010	11:20:27 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:20:27 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:20:27 AM	Tube furnace set to 0
7/21/2010	11:20:27 AM	Run finished at 11:20 AM
7/21/2010	11:20:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/21/2010	11:25:01 AM	Main Vac valve opened
7/21/2010	11:25:34 AM	Main Vac valve closed
7/21/2010	11:25:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/21/2010	11:26:00 AM	Recipe started at 11:25 AM
7/21/2010	11:26:00 AM	H2 valve closed
7/21/2010	11:26:00 AM	BCl3 valve closed
7/21/2010	11:26:00 AM	PH3 valve closed
7/21/2010	11:26:00 AM	SiCl4 pre valve closed
7/21/2010	11:26:00 AM	SiCl4 post valve closed
7/21/2010	11:26:00 AM	Main Vac valve closed
7/21/2010	11:26:00 AM	Bypass valve closed
7/21/2010	11:26:00 AM	Bubbler valve closed
7/21/2010	11:26:00 AM	Helium valve opened
7/21/2010	11:26:00 AM	Helium MFC set to  500.000000
7/21/2010	11:26:00 AM	H2 MFC set to  0.000000
7/21/2010	11:26:00 AM	BCl3 MFC set to  0.000000
7/21/2010	11:26:00 AM	PHl3 MFC set to  0.000000
7/21/2010	11:26:00 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:26:00 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:26:00 AM	Tube furnace set to 0
7/21/2010	11:27:21 AM	Helium valve closed
7/21/2010	11:27:21 AM	H2 valve closed
7/21/2010	11:27:21 AM	BCl3 valve closed
7/21/2010	11:27:21 AM	PH3 valve closed
7/21/2010	11:27:21 AM	SiCl4 pre valve closed
7/21/2010	11:27:21 AM	SiCl4 post valve closed
7/21/2010	11:27:21 AM	Main Vac valve closed
7/21/2010	11:27:21 AM	Bypass valve closed
7/21/2010	11:27:21 AM	Bubbler valve closed
7/21/2010	11:27:21 AM	Helium MFC set to  0.000000
7/21/2010	11:27:21 AM	H2 MFC set to  0.000000
7/21/2010	11:27:21 AM	BCl3 MFC set to  0.000000
7/21/2010	11:27:21 AM	PHl3 MFC set to  0.000000
7/21/2010	11:27:21 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:27:21 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:27:21 AM	Tube furnace set to 0
7/21/2010	11:27:36 AM	Helium valve closed
7/21/2010	11:27:36 AM	H2 valve closed
7/21/2010	11:27:36 AM	BCl3 valve closed
7/21/2010	11:27:36 AM	PH3 valve closed
7/21/2010	11:27:36 AM	SiCl4 pre valve closed
7/21/2010	11:27:36 AM	SiCl4 post valve closed
7/21/2010	11:27:36 AM	Main Vac valve closed
7/21/2010	11:27:36 AM	Bubbler valve closed
7/21/2010	11:27:36 AM	Bypass valve opened
7/21/2010	11:27:36 AM	Helium MFC set to  0.000000
7/21/2010	11:27:36 AM	H2 MFC set to  0.000000
7/21/2010	11:27:36 AM	BCl3 MFC set to  0.000000
7/21/2010	11:27:36 AM	PHl3 MFC set to  0.000000
7/21/2010	11:27:36 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:27:36 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:27:36 AM	Tube furnace set to 0
7/21/2010	11:28:02 AM	Helium valve closed
7/21/2010	11:28:02 AM	H2 valve closed
7/21/2010	11:28:02 AM	BCl3 valve closed
7/21/2010	11:28:02 AM	PH3 valve closed
7/21/2010	11:28:02 AM	SiCl4 pre valve closed
7/21/2010	11:28:02 AM	SiCl4 post valve closed
7/21/2010	11:28:02 AM	Bubbler valve closed
7/21/2010	11:28:02 AM	Main Vac valve opened
7/21/2010	11:28:02 AM	Bypass valve opened
7/21/2010	11:28:02 AM	Helium MFC set to  0.000000
7/21/2010	11:28:02 AM	H2 MFC set to  0.000000
7/21/2010	11:28:02 AM	BCl3 MFC set to  0.000000
7/21/2010	11:28:02 AM	PHl3 MFC set to  0.000000
7/21/2010	11:28:02 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:28:02 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:28:02 AM	Tube furnace set to 0
7/21/2010	11:33:02 AM	H2 valve closed
7/21/2010	11:33:02 AM	BCl3 valve closed
7/21/2010	11:33:02 AM	PH3 valve closed
7/21/2010	11:33:02 AM	SiCl4 pre valve closed
7/21/2010	11:33:02 AM	SiCl4 post valve closed
7/21/2010	11:33:02 AM	Main Vac valve closed
7/21/2010	11:33:02 AM	Bypass valve closed
7/21/2010	11:33:02 AM	Bubbler valve closed
7/21/2010	11:33:02 AM	Helium valve opened
7/21/2010	11:33:02 AM	Helium MFC set to  500.000000
7/21/2010	11:33:02 AM	H2 MFC set to  0.000000
7/21/2010	11:33:02 AM	BCl3 MFC set to  0.000000
7/21/2010	11:33:02 AM	PHl3 MFC set to  0.000000
7/21/2010	11:33:02 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:33:02 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:33:03 AM	Tube furnace set to 0
7/21/2010	11:34:24 AM	Helium valve closed
7/21/2010	11:34:24 AM	H2 valve closed
7/21/2010	11:34:24 AM	BCl3 valve closed
7/21/2010	11:34:24 AM	PH3 valve closed
7/21/2010	11:34:24 AM	SiCl4 pre valve closed
7/21/2010	11:34:24 AM	SiCl4 post valve closed
7/21/2010	11:34:24 AM	Main Vac valve closed
7/21/2010	11:34:24 AM	Bypass valve closed
7/21/2010	11:34:24 AM	Bubbler valve closed
7/21/2010	11:34:24 AM	Helium MFC set to  0.000000
7/21/2010	11:34:24 AM	H2 MFC set to  0.000000
7/21/2010	11:34:24 AM	BCl3 MFC set to  0.000000
7/21/2010	11:34:24 AM	PHl3 MFC set to  0.000000
7/21/2010	11:34:24 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:34:24 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:34:24 AM	Tube furnace set to 0
7/21/2010	11:34:39 AM	Helium valve closed
7/21/2010	11:34:39 AM	H2 valve closed
7/21/2010	11:34:39 AM	BCl3 valve closed
7/21/2010	11:34:39 AM	PH3 valve closed
7/21/2010	11:34:39 AM	SiCl4 pre valve closed
7/21/2010	11:34:39 AM	SiCl4 post valve closed
7/21/2010	11:34:39 AM	Main Vac valve closed
7/21/2010	11:34:39 AM	Bubbler valve closed
7/21/2010	11:34:39 AM	Bypass valve opened
7/21/2010	11:34:39 AM	Helium MFC set to  0.000000
7/21/2010	11:34:39 AM	H2 MFC set to  0.000000
7/21/2010	11:34:39 AM	BCl3 MFC set to  0.000000
7/21/2010	11:34:39 AM	PHl3 MFC set to  0.000000
7/21/2010	11:34:39 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:34:39 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:34:39 AM	Tube furnace set to 0
7/21/2010	11:35:05 AM	Helium valve closed
7/21/2010	11:35:05 AM	H2 valve closed
7/21/2010	11:35:05 AM	BCl3 valve closed
7/21/2010	11:35:05 AM	PH3 valve closed
7/21/2010	11:35:05 AM	SiCl4 pre valve closed
7/21/2010	11:35:05 AM	SiCl4 post valve closed
7/21/2010	11:35:05 AM	Bubbler valve closed
7/21/2010	11:35:05 AM	Main Vac valve opened
7/21/2010	11:35:05 AM	Bypass valve opened
7/21/2010	11:35:05 AM	Helium MFC set to  0.000000
7/21/2010	11:35:05 AM	H2 MFC set to  0.000000
7/21/2010	11:35:05 AM	BCl3 MFC set to  0.000000
7/21/2010	11:35:05 AM	PHl3 MFC set to  0.000000
7/21/2010	11:35:05 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:35:05 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:35:05 AM	Tube furnace set to 0
7/21/2010	11:40:05 AM	H2 valve closed
7/21/2010	11:40:05 AM	BCl3 valve closed
7/21/2010	11:40:05 AM	PH3 valve closed
7/21/2010	11:40:05 AM	SiCl4 pre valve closed
7/21/2010	11:40:05 AM	SiCl4 post valve closed
7/21/2010	11:40:05 AM	Main Vac valve closed
7/21/2010	11:40:05 AM	Bypass valve closed
7/21/2010	11:40:05 AM	Bubbler valve closed
7/21/2010	11:40:05 AM	Helium valve opened
7/21/2010	11:40:05 AM	Helium MFC set to  500.000000
7/21/2010	11:40:05 AM	H2 MFC set to  0.000000
7/21/2010	11:40:05 AM	BCl3 MFC set to  0.000000
7/21/2010	11:40:05 AM	PHl3 MFC set to  0.000000
7/21/2010	11:40:05 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:40:05 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:40:06 AM	Tube furnace set to 0
7/21/2010	11:41:27 AM	Helium valve closed
7/21/2010	11:41:27 AM	H2 valve closed
7/21/2010	11:41:27 AM	BCl3 valve closed
7/21/2010	11:41:27 AM	PH3 valve closed
7/21/2010	11:41:27 AM	SiCl4 pre valve closed
7/21/2010	11:41:27 AM	SiCl4 post valve closed
7/21/2010	11:41:27 AM	Main Vac valve closed
7/21/2010	11:41:27 AM	Bypass valve closed
7/21/2010	11:41:27 AM	Bubbler valve closed
7/21/2010	11:41:27 AM	Helium MFC set to  0.000000
7/21/2010	11:41:27 AM	H2 MFC set to  0.000000
7/21/2010	11:41:27 AM	BCl3 MFC set to  0.000000
7/21/2010	11:41:27 AM	PHl3 MFC set to  0.000000
7/21/2010	11:41:27 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:41:27 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:41:28 AM	Tube furnace set to 0
7/21/2010	11:41:43 AM	Helium valve closed
7/21/2010	11:41:43 AM	H2 valve closed
7/21/2010	11:41:43 AM	BCl3 valve closed
7/21/2010	11:41:43 AM	PH3 valve closed
7/21/2010	11:41:43 AM	SiCl4 pre valve closed
7/21/2010	11:41:43 AM	SiCl4 post valve closed
7/21/2010	11:41:43 AM	Main Vac valve closed
7/21/2010	11:41:43 AM	Bubbler valve closed
7/21/2010	11:41:43 AM	Bypass valve opened
7/21/2010	11:41:43 AM	Helium MFC set to  0.000000
7/21/2010	11:41:43 AM	H2 MFC set to  0.000000
7/21/2010	11:41:43 AM	BCl3 MFC set to  0.000000
7/21/2010	11:41:43 AM	PHl3 MFC set to  0.000000
7/21/2010	11:41:43 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:41:43 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:41:43 AM	Tube furnace set to 0
7/21/2010	11:42:09 AM	Helium valve closed
7/21/2010	11:42:09 AM	H2 valve closed
7/21/2010	11:42:09 AM	BCl3 valve closed
7/21/2010	11:42:09 AM	PH3 valve closed
7/21/2010	11:42:09 AM	SiCl4 pre valve closed
7/21/2010	11:42:09 AM	SiCl4 post valve closed
7/21/2010	11:42:09 AM	Bubbler valve closed
7/21/2010	11:42:09 AM	Main Vac valve opened
7/21/2010	11:42:09 AM	Bypass valve opened
7/21/2010	11:42:09 AM	Helium MFC set to  0.000000
7/21/2010	11:42:09 AM	H2 MFC set to  0.000000
7/21/2010	11:42:09 AM	BCl3 MFC set to  0.000000
7/21/2010	11:42:09 AM	PHl3 MFC set to  0.000000
7/21/2010	11:42:09 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:42:09 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:42:09 AM	Tube furnace set to 0
7/21/2010	11:47:09 AM	Helium valve closed
7/21/2010	11:47:09 AM	H2 valve closed
7/21/2010	11:47:09 AM	BCl3 valve closed
7/21/2010	11:47:09 AM	PH3 valve closed
7/21/2010	11:47:09 AM	SiCl4 pre valve closed
7/21/2010	11:47:09 AM	SiCl4 post valve closed
7/21/2010	11:47:09 AM	Bubbler valve closed
7/21/2010	11:47:09 AM	Main Vac valve opened
7/21/2010	11:47:09 AM	Bypass valve opened
7/21/2010	11:47:09 AM	Helium MFC set to  0.000000
7/21/2010	11:47:09 AM	H2 MFC set to  0.000000
7/21/2010	11:47:09 AM	BCl3 MFC set to  0.000000
7/21/2010	11:47:09 AM	PHl3 MFC set to  0.000000
7/21/2010	11:47:09 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:47:09 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:47:09 AM	Tube furnace set to 0
7/21/2010	11:47:10 AM	Run finished at 11:47 AM
7/21/2010	11:47:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/21/2010	11:48:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/21/2010	11:48:22 AM	Recipe started at 11:48 AM
7/21/2010	11:48:22 AM	Helium valve closed
7/21/2010	11:48:22 AM	H2 valve closed
7/21/2010	11:48:22 AM	BCl3 valve closed
7/21/2010	11:48:22 AM	PH3 valve closed
7/21/2010	11:48:22 AM	SiCl4 pre valve closed
7/21/2010	11:48:22 AM	SiCl4 post valve closed
7/21/2010	11:48:22 AM	Main Vac valve closed
7/21/2010	11:48:22 AM	Bubbler valve closed
7/21/2010	11:48:22 AM	Bypass valve opened
7/21/2010	11:48:22 AM	Helium MFC set to  0.000000
7/21/2010	11:48:22 AM	H2 MFC set to  0.000000
7/21/2010	11:48:22 AM	BCl3 MFC set to  0.000000
7/21/2010	11:48:22 AM	PHl3 MFC set to  0.000000
7/21/2010	11:48:22 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:48:22 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:48:22 AM	Tube furnace set to 0
7/21/2010	11:48:22 AM	Helium valve closed
7/21/2010	11:48:22 AM	H2 valve closed
7/21/2010	11:48:22 AM	BCl3 valve closed
7/21/2010	11:48:22 AM	PH3 valve closed
7/21/2010	11:48:22 AM	SiCl4 pre valve closed
7/21/2010	11:48:22 AM	SiCl4 post valve closed
7/21/2010	11:48:22 AM	Bubbler valve closed
7/21/2010	11:48:22 AM	Main Vac valve opened
7/21/2010	11:48:22 AM	Bypass valve opened
7/21/2010	11:48:22 AM	Helium MFC set to  0.000000
7/21/2010	11:48:22 AM	H2 MFC set to  0.000000
7/21/2010	11:48:22 AM	BCl3 MFC set to  0.000000
7/21/2010	11:48:22 AM	PHl3 MFC set to  0.000000
7/21/2010	11:48:22 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:48:22 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:48:23 AM	Tube furnace set to 0
7/21/2010	11:49:23 AM	H2 valve closed
7/21/2010	11:49:23 AM	BCl3 valve closed
7/21/2010	11:49:23 AM	PH3 valve closed
7/21/2010	11:49:23 AM	SiCl4 pre valve closed
7/21/2010	11:49:23 AM	SiCl4 post valve closed
7/21/2010	11:49:23 AM	Bubbler valve closed
7/21/2010	11:49:23 AM	Helium valve opened
7/21/2010	11:49:23 AM	Main Vac valve opened
7/21/2010	11:49:23 AM	Bypass valve opened
7/21/2010	11:49:23 AM	Helium MFC set to  100.000000
7/21/2010	11:49:23 AM	H2 MFC set to  0.000000
7/21/2010	11:49:23 AM	BCl3 MFC set to  0.000000
7/21/2010	11:49:23 AM	PHl3 MFC set to  0.000000
7/21/2010	11:49:23 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:49:23 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:49:23 AM	Tube furnace set to 0
7/21/2010	11:58:23 AM	Helium valve closed
7/21/2010	11:58:23 AM	H2 valve closed
7/21/2010	11:58:23 AM	BCl3 valve closed
7/21/2010	11:58:23 AM	PH3 valve closed
7/21/2010	11:58:23 AM	SiCl4 pre valve closed
7/21/2010	11:58:23 AM	SiCl4 post valve closed
7/21/2010	11:58:23 AM	Bubbler valve closed
7/21/2010	11:58:23 AM	Main Vac valve opened
7/21/2010	11:58:23 AM	Bypass valve opened
7/21/2010	11:58:23 AM	Helium MFC set to  0.000000
7/21/2010	11:58:23 AM	H2 MFC set to  0.000000
7/21/2010	11:58:23 AM	BCl3 MFC set to  0.000000
7/21/2010	11:58:23 AM	PHl3 MFC set to  0.000000
7/21/2010	11:58:23 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:58:23 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:58:23 AM	Tube furnace set to 0
7/21/2010	11:59:23 AM	H2 valve closed
7/21/2010	11:59:23 AM	BCl3 valve closed
7/21/2010	11:59:23 AM	PH3 valve closed
7/21/2010	11:59:23 AM	SiCl4 pre valve closed
7/21/2010	11:59:23 AM	SiCl4 post valve closed
7/21/2010	11:59:23 AM	Bubbler valve closed
7/21/2010	11:59:23 AM	Helium valve opened
7/21/2010	11:59:23 AM	Main Vac valve opened
7/21/2010	11:59:23 AM	Bypass valve opened
7/21/2010	11:59:23 AM	Helium MFC set to  100.000000
7/21/2010	11:59:23 AM	H2 MFC set to  0.000000
7/21/2010	11:59:23 AM	BCl3 MFC set to  0.000000
7/21/2010	11:59:23 AM	PHl3 MFC set to  0.000000
7/21/2010	11:59:23 AM	SiCl4 MFC set to  0.000000
7/21/2010	11:59:23 AM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:59:23 AM	Tube furnace set to 0
7/21/2010	12:08:23 PM	Helium valve closed
7/21/2010	12:08:23 PM	H2 valve closed
7/21/2010	12:08:23 PM	BCl3 valve closed
7/21/2010	12:08:23 PM	PH3 valve closed
7/21/2010	12:08:23 PM	SiCl4 pre valve closed
7/21/2010	12:08:23 PM	SiCl4 post valve closed
7/21/2010	12:08:23 PM	Bubbler valve closed
7/21/2010	12:08:23 PM	Main Vac valve opened
7/21/2010	12:08:23 PM	Bypass valve opened
7/21/2010	12:08:23 PM	Helium MFC set to  0.000000
7/21/2010	12:08:23 PM	H2 MFC set to  0.000000
7/21/2010	12:08:23 PM	BCl3 MFC set to  0.000000
7/21/2010	12:08:23 PM	PHl3 MFC set to  0.000000
7/21/2010	12:08:23 PM	SiCl4 MFC set to  0.000000
7/21/2010	12:08:23 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	12:08:23 PM	Tube furnace set to 0
7/21/2010	12:09:23 PM	H2 valve closed
7/21/2010	12:09:23 PM	BCl3 valve closed
7/21/2010	12:09:23 PM	PH3 valve closed
7/21/2010	12:09:23 PM	SiCl4 pre valve closed
7/21/2010	12:09:23 PM	SiCl4 post valve closed
7/21/2010	12:09:23 PM	Bubbler valve closed
7/21/2010	12:09:23 PM	Helium valve opened
7/21/2010	12:09:23 PM	Main Vac valve opened
7/21/2010	12:09:23 PM	Bypass valve opened
7/21/2010	12:09:23 PM	Helium MFC set to  100.000000
7/21/2010	12:09:23 PM	H2 MFC set to  0.000000
7/21/2010	12:09:23 PM	BCl3 MFC set to  0.000000
7/21/2010	12:09:23 PM	PHl3 MFC set to  0.000000
7/21/2010	12:09:23 PM	SiCl4 MFC set to  0.000000
7/21/2010	12:09:23 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	12:09:23 PM	Tube furnace set to 0
7/21/2010	12:18:23 PM	Helium valve closed
7/21/2010	12:18:23 PM	H2 valve closed
7/21/2010	12:18:23 PM	BCl3 valve closed
7/21/2010	12:18:23 PM	PH3 valve closed
7/21/2010	12:18:23 PM	SiCl4 pre valve closed
7/21/2010	12:18:23 PM	SiCl4 post valve closed
7/21/2010	12:18:23 PM	Bubbler valve closed
7/21/2010	12:18:23 PM	Main Vac valve opened
7/21/2010	12:18:23 PM	Bypass valve opened
7/21/2010	12:18:23 PM	Helium MFC set to  0.000000
7/21/2010	12:18:23 PM	H2 MFC set to  0.000000
7/21/2010	12:18:23 PM	BCl3 MFC set to  0.000000
7/21/2010	12:18:23 PM	PHl3 MFC set to  0.000000
7/21/2010	12:18:23 PM	SiCl4 MFC set to  0.000000
7/21/2010	12:18:23 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	12:18:24 PM	Tube furnace set to 0
7/21/2010	12:18:25 PM	Run finished at 12:18 PM
7/21/2010	12:18:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/21/2010	1:30:48 PM	Bypass valve closed
7/21/2010	1:30:53 PM	Main Vac valve closed
7/21/2010	1:31:03 PM	Main Vac valve opened
7/21/2010	1:35:46 PM	Bypass valve opened
7/21/2010	1:52:20 PM	Recipe started at 1:52 PM
7/21/2010	1:52:20 PM	Helium valve closed
7/21/2010	1:52:20 PM	BCl3 valve closed
7/21/2010	1:52:20 PM	PH3 valve closed
7/21/2010	1:52:20 PM	SiCl4 pre valve closed
7/21/2010	1:52:20 PM	SiCl4 post valve closed
7/21/2010	1:52:20 PM	Main Vac valve closed
7/21/2010	1:52:20 PM	Bypass valve closed
7/21/2010	1:52:20 PM	Bubbler valve closed
7/21/2010	1:52:20 PM	H2 valve opened
7/21/2010	1:52:20 PM	Helium MFC set to  0.000000
7/21/2010	1:52:20 PM	H2 MFC set to  500.000000
7/21/2010	1:52:20 PM	BCl3 MFC set to  0.000000
7/21/2010	1:52:20 PM	PHl3 MFC set to  0.000000
7/21/2010	1:52:20 PM	SiCl4 MFC set to  0.000000
7/21/2010	1:52:20 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	1:52:20 PM	Tube furnace set to 0
7/21/2010	1:53:43 PM	Helium valve closed
7/21/2010	1:53:43 PM	BCl3 valve closed
7/21/2010	1:53:43 PM	PH3 valve closed
7/21/2010	1:53:43 PM	SiCl4 pre valve closed
7/21/2010	1:53:43 PM	SiCl4 post valve closed
7/21/2010	1:53:43 PM	Main Vac valve closed
7/21/2010	1:53:43 PM	Bypass valve closed
7/21/2010	1:53:43 PM	H2 valve opened
7/21/2010	1:53:43 PM	Bubbler valve opened
7/21/2010	1:53:43 PM	Helium MFC set to  0.000000
7/21/2010	1:53:43 PM	H2 MFC set to  500.000000
7/21/2010	1:53:43 PM	BCl3 MFC set to  0.000000
7/21/2010	1:53:43 PM	PHl3 MFC set to  0.000000
7/21/2010	1:53:43 PM	SiCl4 MFC set to  0.000000
7/21/2010	1:53:43 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	1:53:43 PM	Tube furnace set to 1000
7/21/2010	2:13:43 PM	Helium valve closed
7/21/2010	2:13:43 PM	BCl3 valve closed
7/21/2010	2:13:43 PM	Main Vac valve closed
7/21/2010	2:13:43 PM	Bypass valve closed
7/21/2010	2:13:43 PM	H2 valve opened
7/21/2010	2:13:43 PM	PH3 valve opened
7/21/2010	2:13:43 PM	SiCl4 pre valve opened
7/21/2010	2:13:43 PM	SiCl4 post valve opened
7/21/2010	2:13:43 PM	Bubbler valve opened
7/21/2010	2:13:43 PM	Helium MFC set to  0.000000
7/21/2010	2:13:43 PM	H2 MFC set to  500.000000
7/21/2010	2:13:43 PM	BCl3 MFC set to  0.000000
7/21/2010	2:13:43 PM	PHl3 MFC set to  0.200000
7/21/2010	2:13:43 PM	SiCl4 MFC set to  50.000000
7/21/2010	2:13:43 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	2:13:43 PM	Tube furnace set to 1000
7/21/2010	2:33:43 PM	H2 valve closed
7/21/2010	2:33:43 PM	BCl3 valve closed
7/21/2010	2:33:43 PM	PH3 valve closed
7/21/2010	2:33:43 PM	SiCl4 pre valve closed
7/21/2010	2:33:43 PM	SiCl4 post valve closed
7/21/2010	2:33:43 PM	Main Vac valve closed
7/21/2010	2:33:43 PM	Bypass valve closed
7/21/2010	2:33:43 PM	Helium valve opened
7/21/2010	2:33:43 PM	Bubbler valve opened
7/21/2010	2:33:43 PM	Helium MFC set to  500.000000
7/21/2010	2:33:43 PM	H2 MFC set to  0.000000
7/21/2010	2:33:43 PM	BCl3 MFC set to  0.000000
7/21/2010	2:33:43 PM	PHl3 MFC set to  0.000000
7/21/2010	2:33:43 PM	SiCl4 MFC set to  0.000000
7/21/2010	2:33:43 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	2:33:43 PM	Tube furnace set to 0
7/21/2010	2:53:43 PM	Helium valve closed
7/21/2010	2:53:43 PM	H2 valve closed
7/21/2010	2:53:43 PM	BCl3 valve closed
7/21/2010	2:53:43 PM	PH3 valve closed
7/21/2010	2:53:43 PM	SiCl4 pre valve closed
7/21/2010	2:53:43 PM	SiCl4 post valve closed
7/21/2010	2:53:43 PM	Main Vac valve closed
7/21/2010	2:53:43 PM	Bypass valve closed
7/21/2010	2:53:43 PM	Bubbler valve closed
7/21/2010	2:53:43 PM	Helium MFC set to  0.000000
7/21/2010	2:53:43 PM	H2 MFC set to  0.000000
7/21/2010	2:53:43 PM	BCl3 MFC set to  0.000000
7/21/2010	2:53:43 PM	PHl3 MFC set to  0.000000
7/21/2010	2:53:43 PM	SiCl4 MFC set to  0.000000
7/21/2010	2:53:43 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	2:53:43 PM	Tube furnace set to 0
7/21/2010	2:53:43 PM	Run finished at 2:53 PM
7/21/2010	3:06:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/21/2010	3:06:47 PM	Recipe started at 3:06 PM
7/21/2010	3:06:47 PM	Helium valve closed
7/21/2010	3:06:47 PM	H2 valve closed
7/21/2010	3:06:47 PM	BCl3 valve closed
7/21/2010	3:06:47 PM	PH3 valve closed
7/21/2010	3:06:47 PM	SiCl4 pre valve closed
7/21/2010	3:06:47 PM	SiCl4 post valve closed
7/21/2010	3:06:47 PM	Main Vac valve closed
7/21/2010	3:06:47 PM	Bubbler valve closed
7/21/2010	3:06:47 PM	Bypass valve opened
7/21/2010	3:06:47 PM	Helium MFC set to  0.000000
7/21/2010	3:06:47 PM	H2 MFC set to  0.000000
7/21/2010	3:06:47 PM	BCl3 MFC set to  0.000000
7/21/2010	3:06:47 PM	PHl3 MFC set to  0.000000
7/21/2010	3:06:47 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:06:47 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:06:47 PM	Tube furnace set to 0
7/21/2010	3:07:23 PM	Helium valve closed
7/21/2010	3:07:23 PM	H2 valve closed
7/21/2010	3:07:23 PM	BCl3 valve closed
7/21/2010	3:07:23 PM	PH3 valve closed
7/21/2010	3:07:23 PM	SiCl4 pre valve closed
7/21/2010	3:07:23 PM	SiCl4 post valve closed
7/21/2010	3:07:23 PM	Bubbler valve closed
7/21/2010	3:07:23 PM	Main Vac valve opened
7/21/2010	3:07:23 PM	Bypass valve opened
7/21/2010	3:07:23 PM	Helium MFC set to  0.000000
7/21/2010	3:07:23 PM	H2 MFC set to  0.000000
7/21/2010	3:07:23 PM	BCl3 MFC set to  0.000000
7/21/2010	3:07:23 PM	PHl3 MFC set to  0.000000
7/21/2010	3:07:23 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:07:23 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:07:23 PM	Tube furnace set to 0
7/21/2010	3:07:23 PM	Run finished at 3:07 PM
7/21/2010	3:07:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/21/2010	3:07:58 PM	Bypass valve closed
7/21/2010	3:08:03 PM	Main Vac valve closed
7/21/2010	3:08:14 PM	Main Vac valve opened
7/21/2010	3:08:52 PM	Main Vac valve closed
7/21/2010	3:09:07 PM	Main Vac valve opened
7/21/2010	3:09:17 PM	Bypass valve opened
7/21/2010	3:09:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/21/2010	3:09:25 PM	Recipe started at 3:09 PM
7/21/2010	3:09:25 PM	H2 valve closed
7/21/2010	3:09:25 PM	BCl3 valve closed
7/21/2010	3:09:25 PM	PH3 valve closed
7/21/2010	3:09:25 PM	SiCl4 pre valve closed
7/21/2010	3:09:25 PM	SiCl4 post valve closed
7/21/2010	3:09:25 PM	Main Vac valve closed
7/21/2010	3:09:25 PM	Bypass valve closed
7/21/2010	3:09:25 PM	Bubbler valve closed
7/21/2010	3:09:25 PM	Helium valve opened
7/21/2010	3:09:25 PM	Helium MFC set to  500.000000
7/21/2010	3:09:25 PM	H2 MFC set to  0.000000
7/21/2010	3:09:25 PM	BCl3 MFC set to  0.000000
7/21/2010	3:09:25 PM	PHl3 MFC set to  0.000000
7/21/2010	3:09:25 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:09:25 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:09:25 PM	Tube furnace set to 0
7/21/2010	3:10:45 PM	Helium valve closed
7/21/2010	3:10:45 PM	H2 valve closed
7/21/2010	3:10:45 PM	BCl3 valve closed
7/21/2010	3:10:45 PM	PH3 valve closed
7/21/2010	3:10:45 PM	SiCl4 pre valve closed
7/21/2010	3:10:45 PM	SiCl4 post valve closed
7/21/2010	3:10:45 PM	Main Vac valve closed
7/21/2010	3:10:45 PM	Bypass valve closed
7/21/2010	3:10:45 PM	Bubbler valve closed
7/21/2010	3:10:45 PM	Helium MFC set to  0.000000
7/21/2010	3:10:45 PM	H2 MFC set to  0.000000
7/21/2010	3:10:45 PM	BCl3 MFC set to  0.000000
7/21/2010	3:10:45 PM	PHl3 MFC set to  0.000000
7/21/2010	3:10:45 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:10:45 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:10:46 PM	Tube furnace set to 0
7/21/2010	3:11:01 PM	Helium valve closed
7/21/2010	3:11:01 PM	H2 valve closed
7/21/2010	3:11:01 PM	BCl3 valve closed
7/21/2010	3:11:01 PM	PH3 valve closed
7/21/2010	3:11:01 PM	SiCl4 pre valve closed
7/21/2010	3:11:01 PM	SiCl4 post valve closed
7/21/2010	3:11:01 PM	Main Vac valve closed
7/21/2010	3:11:01 PM	Bubbler valve closed
7/21/2010	3:11:01 PM	Bypass valve opened
7/21/2010	3:11:01 PM	Helium MFC set to  0.000000
7/21/2010	3:11:01 PM	H2 MFC set to  0.000000
7/21/2010	3:11:01 PM	BCl3 MFC set to  0.000000
7/21/2010	3:11:01 PM	PHl3 MFC set to  0.000000
7/21/2010	3:11:01 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:11:01 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:11:01 PM	Tube furnace set to 0
7/21/2010	3:11:26 PM	Helium valve closed
7/21/2010	3:11:26 PM	H2 valve closed
7/21/2010	3:11:26 PM	BCl3 valve closed
7/21/2010	3:11:26 PM	PH3 valve closed
7/21/2010	3:11:26 PM	SiCl4 pre valve closed
7/21/2010	3:11:26 PM	SiCl4 post valve closed
7/21/2010	3:11:26 PM	Bubbler valve closed
7/21/2010	3:11:26 PM	Main Vac valve opened
7/21/2010	3:11:26 PM	Bypass valve opened
7/21/2010	3:11:26 PM	Helium MFC set to  0.000000
7/21/2010	3:11:26 PM	H2 MFC set to  0.000000
7/21/2010	3:11:26 PM	BCl3 MFC set to  0.000000
7/21/2010	3:11:26 PM	PHl3 MFC set to  0.000000
7/21/2010	3:11:26 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:11:26 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:11:26 PM	Tube furnace set to 0
7/21/2010	3:16:26 PM	H2 valve closed
7/21/2010	3:16:26 PM	BCl3 valve closed
7/21/2010	3:16:27 PM	PH3 valve closed
7/21/2010	3:16:27 PM	SiCl4 pre valve closed
7/21/2010	3:16:27 PM	SiCl4 post valve closed
7/21/2010	3:16:27 PM	Main Vac valve closed
7/21/2010	3:16:27 PM	Bypass valve closed
7/21/2010	3:16:27 PM	Bubbler valve closed
7/21/2010	3:16:27 PM	Helium valve opened
7/21/2010	3:16:27 PM	Helium MFC set to  500.000000
7/21/2010	3:16:27 PM	H2 MFC set to  0.000000
7/21/2010	3:16:27 PM	BCl3 MFC set to  0.000000
7/21/2010	3:16:27 PM	PHl3 MFC set to  0.000000
7/21/2010	3:16:27 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:16:27 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:16:27 PM	Tube furnace set to 0
7/21/2010	3:17:47 PM	Helium valve closed
7/21/2010	3:17:47 PM	H2 valve closed
7/21/2010	3:17:47 PM	BCl3 valve closed
7/21/2010	3:17:47 PM	PH3 valve closed
7/21/2010	3:17:47 PM	SiCl4 pre valve closed
7/21/2010	3:17:47 PM	SiCl4 post valve closed
7/21/2010	3:17:47 PM	Main Vac valve closed
7/21/2010	3:17:47 PM	Bypass valve closed
7/21/2010	3:17:47 PM	Bubbler valve closed
7/21/2010	3:17:47 PM	Helium MFC set to  0.000000
7/21/2010	3:17:47 PM	H2 MFC set to  0.000000
7/21/2010	3:17:47 PM	BCl3 MFC set to  0.000000
7/21/2010	3:17:47 PM	PHl3 MFC set to  0.000000
7/21/2010	3:17:47 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:17:47 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:17:47 PM	Tube furnace set to 0
7/21/2010	3:18:02 PM	Helium valve closed
7/21/2010	3:18:02 PM	H2 valve closed
7/21/2010	3:18:02 PM	BCl3 valve closed
7/21/2010	3:18:02 PM	PH3 valve closed
7/21/2010	3:18:02 PM	SiCl4 pre valve closed
7/21/2010	3:18:02 PM	SiCl4 post valve closed
7/21/2010	3:18:02 PM	Main Vac valve closed
7/21/2010	3:18:02 PM	Bubbler valve closed
7/21/2010	3:18:02 PM	Bypass valve opened
7/21/2010	3:18:02 PM	Helium MFC set to  0.000000
7/21/2010	3:18:02 PM	H2 MFC set to  0.000000
7/21/2010	3:18:02 PM	BCl3 MFC set to  0.000000
7/21/2010	3:18:02 PM	PHl3 MFC set to  0.000000
7/21/2010	3:18:02 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:18:02 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:18:03 PM	Tube furnace set to 0
7/21/2010	3:18:28 PM	Helium valve closed
7/21/2010	3:18:28 PM	H2 valve closed
7/21/2010	3:18:28 PM	BCl3 valve closed
7/21/2010	3:18:28 PM	PH3 valve closed
7/21/2010	3:18:28 PM	SiCl4 pre valve closed
7/21/2010	3:18:28 PM	SiCl4 post valve closed
7/21/2010	3:18:28 PM	Bubbler valve closed
7/21/2010	3:18:28 PM	Main Vac valve opened
7/21/2010	3:18:28 PM	Bypass valve opened
7/21/2010	3:18:28 PM	Helium MFC set to  0.000000
7/21/2010	3:18:28 PM	H2 MFC set to  0.000000
7/21/2010	3:18:28 PM	BCl3 MFC set to  0.000000
7/21/2010	3:18:28 PM	PHl3 MFC set to  0.000000
7/21/2010	3:18:28 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:18:28 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:18:28 PM	Tube furnace set to 0
7/21/2010	3:23:28 PM	H2 valve closed
7/21/2010	3:23:28 PM	BCl3 valve closed
7/21/2010	3:23:28 PM	PH3 valve closed
7/21/2010	3:23:28 PM	SiCl4 pre valve closed
7/21/2010	3:23:28 PM	SiCl4 post valve closed
7/21/2010	3:23:28 PM	Main Vac valve closed
7/21/2010	3:23:28 PM	Bypass valve closed
7/21/2010	3:23:28 PM	Bubbler valve closed
7/21/2010	3:23:28 PM	Helium valve opened
7/21/2010	3:23:28 PM	Helium MFC set to  500.000000
7/21/2010	3:23:28 PM	H2 MFC set to  0.000000
7/21/2010	3:23:28 PM	BCl3 MFC set to  0.000000
7/21/2010	3:23:28 PM	PHl3 MFC set to  0.000000
7/21/2010	3:23:28 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:23:28 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:23:28 PM	Tube furnace set to 0
7/21/2010	3:24:49 PM	Helium valve closed
7/21/2010	3:24:49 PM	H2 valve closed
7/21/2010	3:24:49 PM	BCl3 valve closed
7/21/2010	3:24:49 PM	PH3 valve closed
7/21/2010	3:24:49 PM	SiCl4 pre valve closed
7/21/2010	3:24:49 PM	SiCl4 post valve closed
7/21/2010	3:24:49 PM	Main Vac valve closed
7/21/2010	3:24:49 PM	Bypass valve closed
7/21/2010	3:24:49 PM	Bubbler valve closed
7/21/2010	3:24:49 PM	Helium MFC set to  0.000000
7/21/2010	3:24:49 PM	H2 MFC set to  0.000000
7/21/2010	3:24:49 PM	BCl3 MFC set to  0.000000
7/21/2010	3:24:49 PM	PHl3 MFC set to  0.000000
7/21/2010	3:24:49 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:24:49 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:24:49 PM	Tube furnace set to 0
7/21/2010	3:25:04 PM	Helium valve closed
7/21/2010	3:25:04 PM	H2 valve closed
7/21/2010	3:25:04 PM	BCl3 valve closed
7/21/2010	3:25:04 PM	PH3 valve closed
7/21/2010	3:25:04 PM	SiCl4 pre valve closed
7/21/2010	3:25:04 PM	SiCl4 post valve closed
7/21/2010	3:25:04 PM	Main Vac valve closed
7/21/2010	3:25:04 PM	Bubbler valve closed
7/21/2010	3:25:04 PM	Bypass valve opened
7/21/2010	3:25:04 PM	Helium MFC set to  0.000000
7/21/2010	3:25:04 PM	H2 MFC set to  0.000000
7/21/2010	3:25:04 PM	BCl3 MFC set to  0.000000
7/21/2010	3:25:04 PM	PHl3 MFC set to  0.000000
7/21/2010	3:25:04 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:25:04 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:25:05 PM	Tube furnace set to 0
7/21/2010	3:25:30 PM	Helium valve closed
7/21/2010	3:25:30 PM	H2 valve closed
7/21/2010	3:25:30 PM	BCl3 valve closed
7/21/2010	3:25:30 PM	PH3 valve closed
7/21/2010	3:25:30 PM	SiCl4 pre valve closed
7/21/2010	3:25:30 PM	SiCl4 post valve closed
7/21/2010	3:25:30 PM	Bubbler valve closed
7/21/2010	3:25:30 PM	Main Vac valve opened
7/21/2010	3:25:30 PM	Bypass valve opened
7/21/2010	3:25:30 PM	Helium MFC set to  0.000000
7/21/2010	3:25:30 PM	H2 MFC set to  0.000000
7/21/2010	3:25:30 PM	BCl3 MFC set to  0.000000
7/21/2010	3:25:30 PM	PHl3 MFC set to  0.000000
7/21/2010	3:25:30 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:25:30 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:25:30 PM	Tube furnace set to 0
7/21/2010	3:30:30 PM	Helium valve closed
7/21/2010	3:30:30 PM	H2 valve closed
7/21/2010	3:30:30 PM	BCl3 valve closed
7/21/2010	3:30:30 PM	PH3 valve closed
7/21/2010	3:30:30 PM	SiCl4 pre valve closed
7/21/2010	3:30:30 PM	SiCl4 post valve closed
7/21/2010	3:30:30 PM	Bubbler valve closed
7/21/2010	3:30:30 PM	Main Vac valve opened
7/21/2010	3:30:30 PM	Bypass valve opened
7/21/2010	3:30:30 PM	Helium MFC set to  0.000000
7/21/2010	3:30:30 PM	H2 MFC set to  0.000000
7/21/2010	3:30:30 PM	BCl3 MFC set to  0.000000
7/21/2010	3:30:30 PM	PHl3 MFC set to  0.000000
7/21/2010	3:30:30 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:30:30 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:30:30 PM	Tube furnace set to 0
7/21/2010	3:30:31 PM	Run finished at 3:30 PM
7/21/2010	3:30:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/21/2010	3:37:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/21/2010	3:37:40 PM	Recipe started at 3:37 PM
7/21/2010	3:37:40 PM	Helium valve closed
7/21/2010	3:37:40 PM	H2 valve closed
7/21/2010	3:37:40 PM	BCl3 valve closed
7/21/2010	3:37:40 PM	PH3 valve closed
7/21/2010	3:37:40 PM	SiCl4 pre valve closed
7/21/2010	3:37:40 PM	SiCl4 post valve closed
7/21/2010	3:37:40 PM	Main Vac valve closed
7/21/2010	3:37:40 PM	Bubbler valve closed
7/21/2010	3:37:40 PM	Bypass valve opened
7/21/2010	3:37:40 PM	Helium MFC set to  0.000000
7/21/2010	3:37:40 PM	H2 MFC set to  0.000000
7/21/2010	3:37:40 PM	BCl3 MFC set to  0.000000
7/21/2010	3:37:40 PM	PHl3 MFC set to  0.000000
7/21/2010	3:37:40 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:37:40 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:37:40 PM	Tube furnace set to 0
7/21/2010	3:37:40 PM	Helium valve closed
7/21/2010	3:37:40 PM	H2 valve closed
7/21/2010	3:37:40 PM	BCl3 valve closed
7/21/2010	3:37:40 PM	PH3 valve closed
7/21/2010	3:37:40 PM	SiCl4 pre valve closed
7/21/2010	3:37:40 PM	SiCl4 post valve closed
7/21/2010	3:37:40 PM	Bubbler valve closed
7/21/2010	3:37:40 PM	Main Vac valve opened
7/21/2010	3:37:40 PM	Bypass valve opened
7/21/2010	3:37:40 PM	Helium MFC set to  0.000000
7/21/2010	3:37:40 PM	H2 MFC set to  0.000000
7/21/2010	3:37:40 PM	BCl3 MFC set to  0.000000
7/21/2010	3:37:40 PM	PHl3 MFC set to  0.000000
7/21/2010	3:37:40 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:37:40 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:37:40 PM	Tube furnace set to 0
7/21/2010	3:38:40 PM	H2 valve closed
7/21/2010	3:38:40 PM	BCl3 valve closed
7/21/2010	3:38:40 PM	PH3 valve closed
7/21/2010	3:38:40 PM	SiCl4 pre valve closed
7/21/2010	3:38:40 PM	SiCl4 post valve closed
7/21/2010	3:38:40 PM	Bubbler valve closed
7/21/2010	3:38:40 PM	Helium valve opened
7/21/2010	3:38:40 PM	Main Vac valve opened
7/21/2010	3:38:40 PM	Bypass valve opened
7/21/2010	3:38:40 PM	Helium MFC set to  100.000000
7/21/2010	3:38:40 PM	H2 MFC set to  0.000000
7/21/2010	3:38:40 PM	BCl3 MFC set to  0.000000
7/21/2010	3:38:40 PM	PHl3 MFC set to  0.000000
7/21/2010	3:38:40 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:38:40 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:38:41 PM	Tube furnace set to 0
7/21/2010	3:47:41 PM	Helium valve closed
7/21/2010	3:47:41 PM	H2 valve closed
7/21/2010	3:47:41 PM	BCl3 valve closed
7/21/2010	3:47:41 PM	PH3 valve closed
7/21/2010	3:47:41 PM	SiCl4 pre valve closed
7/21/2010	3:47:41 PM	SiCl4 post valve closed
7/21/2010	3:47:41 PM	Bubbler valve closed
7/21/2010	3:47:41 PM	Main Vac valve opened
7/21/2010	3:47:41 PM	Bypass valve opened
7/21/2010	3:47:41 PM	Helium MFC set to  0.000000
7/21/2010	3:47:41 PM	H2 MFC set to  0.000000
7/21/2010	3:47:41 PM	BCl3 MFC set to  0.000000
7/21/2010	3:47:41 PM	PHl3 MFC set to  0.000000
7/21/2010	3:47:41 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:47:41 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:47:41 PM	Tube furnace set to 0
7/21/2010	3:48:41 PM	H2 valve closed
7/21/2010	3:48:41 PM	BCl3 valve closed
7/21/2010	3:48:41 PM	PH3 valve closed
7/21/2010	3:48:41 PM	SiCl4 pre valve closed
7/21/2010	3:48:41 PM	SiCl4 post valve closed
7/21/2010	3:48:41 PM	Bubbler valve closed
7/21/2010	3:48:41 PM	Helium valve opened
7/21/2010	3:48:41 PM	Main Vac valve opened
7/21/2010	3:48:41 PM	Bypass valve opened
7/21/2010	3:48:41 PM	Helium MFC set to  100.000000
7/21/2010	3:48:41 PM	H2 MFC set to  0.000000
7/21/2010	3:48:41 PM	BCl3 MFC set to  0.000000
7/21/2010	3:48:41 PM	PHl3 MFC set to  0.000000
7/21/2010	3:48:41 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:48:41 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:48:41 PM	Tube furnace set to 0
7/21/2010	3:57:41 PM	Helium valve closed
7/21/2010	3:57:41 PM	H2 valve closed
7/21/2010	3:57:41 PM	BCl3 valve closed
7/21/2010	3:57:41 PM	PH3 valve closed
7/21/2010	3:57:41 PM	SiCl4 pre valve closed
7/21/2010	3:57:41 PM	SiCl4 post valve closed
7/21/2010	3:57:41 PM	Bubbler valve closed
7/21/2010	3:57:41 PM	Main Vac valve opened
7/21/2010	3:57:41 PM	Bypass valve opened
7/21/2010	3:57:41 PM	Helium MFC set to  0.000000
7/21/2010	3:57:41 PM	H2 MFC set to  0.000000
7/21/2010	3:57:41 PM	BCl3 MFC set to  0.000000
7/21/2010	3:57:41 PM	PHl3 MFC set to  0.000000
7/21/2010	3:57:41 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:57:41 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:57:41 PM	Tube furnace set to 0
7/21/2010	3:58:41 PM	H2 valve closed
7/21/2010	3:58:41 PM	BCl3 valve closed
7/21/2010	3:58:41 PM	PH3 valve closed
7/21/2010	3:58:41 PM	SiCl4 pre valve closed
7/21/2010	3:58:41 PM	SiCl4 post valve closed
7/21/2010	3:58:41 PM	Bubbler valve closed
7/21/2010	3:58:41 PM	Helium valve opened
7/21/2010	3:58:41 PM	Main Vac valve opened
7/21/2010	3:58:41 PM	Bypass valve opened
7/21/2010	3:58:41 PM	Helium MFC set to  100.000000
7/21/2010	3:58:41 PM	H2 MFC set to  0.000000
7/21/2010	3:58:41 PM	BCl3 MFC set to  0.000000
7/21/2010	3:58:41 PM	PHl3 MFC set to  0.000000
7/21/2010	3:58:41 PM	SiCl4 MFC set to  0.000000
7/21/2010	3:58:41 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	3:58:41 PM	Tube furnace set to 0
7/21/2010	4:07:41 PM	Helium valve closed
7/21/2010	4:07:41 PM	H2 valve closed
7/21/2010	4:07:41 PM	BCl3 valve closed
7/21/2010	4:07:41 PM	PH3 valve closed
7/21/2010	4:07:41 PM	SiCl4 pre valve closed
7/21/2010	4:07:41 PM	SiCl4 post valve closed
7/21/2010	4:07:41 PM	Bubbler valve closed
7/21/2010	4:07:41 PM	Main Vac valve opened
7/21/2010	4:07:41 PM	Bypass valve opened
7/21/2010	4:07:41 PM	Helium MFC set to  0.000000
7/21/2010	4:07:41 PM	H2 MFC set to  0.000000
7/21/2010	4:07:41 PM	BCl3 MFC set to  0.000000
7/21/2010	4:07:41 PM	PHl3 MFC set to  0.000000
7/21/2010	4:07:41 PM	SiCl4 MFC set to  0.000000
7/21/2010	4:07:41 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	4:07:41 PM	Tube furnace set to 0
7/21/2010	4:07:42 PM	Run finished at 4:07 PM
7/21/2010	4:07:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/21/2010	4:56:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/21/2010	4:56:42 PM	Recipe started at 4:56 PM
7/21/2010	4:56:42 PM	H2 valve closed
7/21/2010	4:56:42 PM	BCl3 valve closed
7/21/2010	4:56:42 PM	PH3 valve closed
7/21/2010	4:56:42 PM	SiCl4 pre valve closed
7/21/2010	4:56:42 PM	SiCl4 post valve closed
7/21/2010	4:56:42 PM	Main Vac valve closed
7/21/2010	4:56:42 PM	Bypass valve closed
7/21/2010	4:56:42 PM	Bubbler valve closed
7/21/2010	4:56:42 PM	Helium valve opened
7/21/2010	4:56:42 PM	Helium MFC set to  500.000000
7/21/2010	4:56:42 PM	H2 MFC set to  0.000000
7/21/2010	4:56:42 PM	BCl3 MFC set to  0.000000
7/21/2010	4:56:42 PM	PHl3 MFC set to  0.000000
7/21/2010	4:56:42 PM	SiCl4 MFC set to  0.000000
7/21/2010	4:56:42 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	4:56:42 PM	Tube furnace set to 0
7/21/2010	4:58:02 PM	Helium valve closed
7/21/2010	4:58:02 PM	H2 valve closed
7/21/2010	4:58:02 PM	BCl3 valve closed
7/21/2010	4:58:02 PM	PH3 valve closed
7/21/2010	4:58:02 PM	SiCl4 pre valve closed
7/21/2010	4:58:02 PM	SiCl4 post valve closed
7/21/2010	4:58:02 PM	Main Vac valve closed
7/21/2010	4:58:02 PM	Bypass valve closed
7/21/2010	4:58:02 PM	Bubbler valve closed
7/21/2010	4:58:02 PM	Helium MFC set to  0.000000
7/21/2010	4:58:02 PM	H2 MFC set to  0.000000
7/21/2010	4:58:02 PM	BCl3 MFC set to  0.000000
7/21/2010	4:58:02 PM	PHl3 MFC set to  0.000000
7/21/2010	4:58:02 PM	SiCl4 MFC set to  0.000000
7/21/2010	4:58:02 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	4:58:02 PM	Tube furnace set to 0
7/21/2010	4:58:02 PM	Run finished at 4:58 PM
7/21/2010	4:58:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/21/2010	5:01:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/21/2010	5:01:55 PM	Recipe started at 5:01 PM
7/21/2010	5:01:55 PM	Helium valve closed
7/21/2010	5:01:55 PM	H2 valve closed
7/21/2010	5:01:55 PM	BCl3 valve closed
7/21/2010	5:01:55 PM	PH3 valve closed
7/21/2010	5:01:55 PM	SiCl4 pre valve closed
7/21/2010	5:01:55 PM	SiCl4 post valve closed
7/21/2010	5:01:55 PM	Main Vac valve closed
7/21/2010	5:01:55 PM	Bubbler valve closed
7/21/2010	5:01:55 PM	Bypass valve opened
7/21/2010	5:01:55 PM	Helium MFC set to  0.000000
7/21/2010	5:01:55 PM	H2 MFC set to  0.000000
7/21/2010	5:01:55 PM	BCl3 MFC set to  0.000000
7/21/2010	5:01:55 PM	PHl3 MFC set to  0.000000
7/21/2010	5:01:55 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:01:55 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:01:55 PM	Tube furnace set to 0
7/21/2010	5:02:30 PM	Helium valve closed
7/21/2010	5:02:30 PM	H2 valve closed
7/21/2010	5:02:30 PM	BCl3 valve closed
7/21/2010	5:02:30 PM	PH3 valve closed
7/21/2010	5:02:30 PM	SiCl4 pre valve closed
7/21/2010	5:02:30 PM	SiCl4 post valve closed
7/21/2010	5:02:30 PM	Bubbler valve closed
7/21/2010	5:02:30 PM	Main Vac valve opened
7/21/2010	5:02:30 PM	Bypass valve opened
7/21/2010	5:02:30 PM	Helium MFC set to  0.000000
7/21/2010	5:02:30 PM	H2 MFC set to  0.000000
7/21/2010	5:02:30 PM	BCl3 MFC set to  0.000000
7/21/2010	5:02:30 PM	PHl3 MFC set to  0.000000
7/21/2010	5:02:30 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:02:30 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:02:31 PM	Tube furnace set to 0
7/21/2010	5:02:31 PM	Run finished at 5:02 PM
7/21/2010	5:02:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/21/2010	5:03:07 PM	Bypass valve closed
7/21/2010	5:03:10 PM	Main Vac valve closed
7/21/2010	5:03:31 PM	Main Vac valve opened
7/21/2010	5:04:23 PM	Main Vac valve closed
7/21/2010	5:04:47 PM	Main Vac valve opened
7/21/2010	5:04:51 PM	Bypass valve opened
7/21/2010	5:04:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/21/2010	5:04:59 PM	Recipe started at 5:04 PM
7/21/2010	5:04:59 PM	H2 valve closed
7/21/2010	5:04:59 PM	BCl3 valve closed
7/21/2010	5:04:59 PM	PH3 valve closed
7/21/2010	5:04:59 PM	SiCl4 pre valve closed
7/21/2010	5:04:59 PM	SiCl4 post valve closed
7/21/2010	5:04:59 PM	Main Vac valve closed
7/21/2010	5:04:59 PM	Bypass valve closed
7/21/2010	5:04:59 PM	Bubbler valve closed
7/21/2010	5:04:59 PM	Helium valve opened
7/21/2010	5:04:59 PM	Helium MFC set to  500.000000
7/21/2010	5:04:59 PM	H2 MFC set to  0.000000
7/21/2010	5:04:59 PM	BCl3 MFC set to  0.000000
7/21/2010	5:04:59 PM	PHl3 MFC set to  0.000000
7/21/2010	5:04:59 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:04:59 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:04:59 PM	Tube furnace set to 0
7/21/2010	5:06:21 PM	Helium valve closed
7/21/2010	5:06:21 PM	H2 valve closed
7/21/2010	5:06:21 PM	BCl3 valve closed
7/21/2010	5:06:21 PM	PH3 valve closed
7/21/2010	5:06:21 PM	SiCl4 pre valve closed
7/21/2010	5:06:21 PM	SiCl4 post valve closed
7/21/2010	5:06:21 PM	Main Vac valve closed
7/21/2010	5:06:21 PM	Bypass valve closed
7/21/2010	5:06:21 PM	Bubbler valve closed
7/21/2010	5:06:21 PM	Helium MFC set to  0.000000
7/21/2010	5:06:21 PM	H2 MFC set to  0.000000
7/21/2010	5:06:21 PM	BCl3 MFC set to  0.000000
7/21/2010	5:06:21 PM	PHl3 MFC set to  0.000000
7/21/2010	5:06:21 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:06:21 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:06:21 PM	Tube furnace set to 0
7/21/2010	5:06:36 PM	Helium valve closed
7/21/2010	5:06:36 PM	H2 valve closed
7/21/2010	5:06:36 PM	BCl3 valve closed
7/21/2010	5:06:36 PM	PH3 valve closed
7/21/2010	5:06:36 PM	SiCl4 pre valve closed
7/21/2010	5:06:36 PM	SiCl4 post valve closed
7/21/2010	5:06:36 PM	Main Vac valve closed
7/21/2010	5:06:36 PM	Bubbler valve closed
7/21/2010	5:06:36 PM	Bypass valve opened
7/21/2010	5:06:36 PM	Helium MFC set to  0.000000
7/21/2010	5:06:36 PM	H2 MFC set to  0.000000
7/21/2010	5:06:36 PM	BCl3 MFC set to  0.000000
7/21/2010	5:06:36 PM	PHl3 MFC set to  0.000000
7/21/2010	5:06:36 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:06:36 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:06:36 PM	Tube furnace set to 0
7/21/2010	5:07:02 PM	Helium valve closed
7/21/2010	5:07:02 PM	H2 valve closed
7/21/2010	5:07:02 PM	BCl3 valve closed
7/21/2010	5:07:02 PM	PH3 valve closed
7/21/2010	5:07:02 PM	SiCl4 pre valve closed
7/21/2010	5:07:02 PM	SiCl4 post valve closed
7/21/2010	5:07:02 PM	Bubbler valve closed
7/21/2010	5:07:02 PM	Main Vac valve opened
7/21/2010	5:07:02 PM	Bypass valve opened
7/21/2010	5:07:02 PM	Helium MFC set to  0.000000
7/21/2010	5:07:02 PM	H2 MFC set to  0.000000
7/21/2010	5:07:02 PM	BCl3 MFC set to  0.000000
7/21/2010	5:07:02 PM	PHl3 MFC set to  0.000000
7/21/2010	5:07:02 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:07:02 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:07:02 PM	Tube furnace set to 0
7/21/2010	5:12:02 PM	H2 valve closed
7/21/2010	5:12:02 PM	BCl3 valve closed
7/21/2010	5:12:02 PM	PH3 valve closed
7/21/2010	5:12:02 PM	SiCl4 pre valve closed
7/21/2010	5:12:02 PM	SiCl4 post valve closed
7/21/2010	5:12:02 PM	Main Vac valve closed
7/21/2010	5:12:02 PM	Bypass valve closed
7/21/2010	5:12:02 PM	Bubbler valve closed
7/21/2010	5:12:02 PM	Helium valve opened
7/21/2010	5:12:02 PM	Helium MFC set to  500.000000
7/21/2010	5:12:02 PM	H2 MFC set to  0.000000
7/21/2010	5:12:02 PM	BCl3 MFC set to  0.000000
7/21/2010	5:12:02 PM	PHl3 MFC set to  0.000000
7/21/2010	5:12:02 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:12:02 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:12:02 PM	Tube furnace set to 0
7/21/2010	5:13:24 PM	Helium valve closed
7/21/2010	5:13:24 PM	H2 valve closed
7/21/2010	5:13:24 PM	BCl3 valve closed
7/21/2010	5:13:24 PM	PH3 valve closed
7/21/2010	5:13:24 PM	SiCl4 pre valve closed
7/21/2010	5:13:24 PM	SiCl4 post valve closed
7/21/2010	5:13:24 PM	Main Vac valve closed
7/21/2010	5:13:24 PM	Bypass valve closed
7/21/2010	5:13:24 PM	Bubbler valve closed
7/21/2010	5:13:24 PM	Helium MFC set to  0.000000
7/21/2010	5:13:24 PM	H2 MFC set to  0.000000
7/21/2010	5:13:24 PM	BCl3 MFC set to  0.000000
7/21/2010	5:13:24 PM	PHl3 MFC set to  0.000000
7/21/2010	5:13:24 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:13:24 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:13:24 PM	Tube furnace set to 0
7/21/2010	5:13:39 PM	Helium valve closed
7/21/2010	5:13:39 PM	H2 valve closed
7/21/2010	5:13:39 PM	BCl3 valve closed
7/21/2010	5:13:39 PM	PH3 valve closed
7/21/2010	5:13:39 PM	SiCl4 pre valve closed
7/21/2010	5:13:39 PM	SiCl4 post valve closed
7/21/2010	5:13:39 PM	Main Vac valve closed
7/21/2010	5:13:39 PM	Bubbler valve closed
7/21/2010	5:13:39 PM	Bypass valve opened
7/21/2010	5:13:39 PM	Helium MFC set to  0.000000
7/21/2010	5:13:39 PM	H2 MFC set to  0.000000
7/21/2010	5:13:39 PM	BCl3 MFC set to  0.000000
7/21/2010	5:13:39 PM	PHl3 MFC set to  0.000000
7/21/2010	5:13:39 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:13:39 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:13:39 PM	Tube furnace set to 0
7/21/2010	5:14:05 PM	Helium valve closed
7/21/2010	5:14:05 PM	H2 valve closed
7/21/2010	5:14:05 PM	BCl3 valve closed
7/21/2010	5:14:05 PM	PH3 valve closed
7/21/2010	5:14:05 PM	SiCl4 pre valve closed
7/21/2010	5:14:05 PM	SiCl4 post valve closed
7/21/2010	5:14:05 PM	Bubbler valve closed
7/21/2010	5:14:05 PM	Main Vac valve opened
7/21/2010	5:14:05 PM	Bypass valve opened
7/21/2010	5:14:05 PM	Helium MFC set to  0.000000
7/21/2010	5:14:05 PM	H2 MFC set to  0.000000
7/21/2010	5:14:05 PM	BCl3 MFC set to  0.000000
7/21/2010	5:14:05 PM	PHl3 MFC set to  0.000000
7/21/2010	5:14:05 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:14:05 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:14:05 PM	Tube furnace set to 0
7/21/2010	5:19:05 PM	H2 valve closed
7/21/2010	5:19:05 PM	BCl3 valve closed
7/21/2010	5:19:05 PM	PH3 valve closed
7/21/2010	5:19:05 PM	SiCl4 pre valve closed
7/21/2010	5:19:05 PM	SiCl4 post valve closed
7/21/2010	5:19:05 PM	Main Vac valve closed
7/21/2010	5:19:05 PM	Bypass valve closed
7/21/2010	5:19:05 PM	Bubbler valve closed
7/21/2010	5:19:05 PM	Helium valve opened
7/21/2010	5:19:05 PM	Helium MFC set to  500.000000
7/21/2010	5:19:05 PM	H2 MFC set to  0.000000
7/21/2010	5:19:05 PM	BCl3 MFC set to  0.000000
7/21/2010	5:19:05 PM	PHl3 MFC set to  0.000000
7/21/2010	5:19:05 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:19:05 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:19:05 PM	Tube furnace set to 0
7/21/2010	5:20:27 PM	Helium valve closed
7/21/2010	5:20:27 PM	H2 valve closed
7/21/2010	5:20:27 PM	BCl3 valve closed
7/21/2010	5:20:27 PM	PH3 valve closed
7/21/2010	5:20:27 PM	SiCl4 pre valve closed
7/21/2010	5:20:27 PM	SiCl4 post valve closed
7/21/2010	5:20:27 PM	Main Vac valve closed
7/21/2010	5:20:27 PM	Bypass valve closed
7/21/2010	5:20:27 PM	Bubbler valve closed
7/21/2010	5:20:27 PM	Helium MFC set to  0.000000
7/21/2010	5:20:27 PM	H2 MFC set to  0.000000
7/21/2010	5:20:27 PM	BCl3 MFC set to  0.000000
7/21/2010	5:20:27 PM	PHl3 MFC set to  0.000000
7/21/2010	5:20:27 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:20:27 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:20:27 PM	Tube furnace set to 0
7/21/2010	5:20:42 PM	Helium valve closed
7/21/2010	5:20:42 PM	H2 valve closed
7/21/2010	5:20:42 PM	BCl3 valve closed
7/21/2010	5:20:42 PM	PH3 valve closed
7/21/2010	5:20:42 PM	SiCl4 pre valve closed
7/21/2010	5:20:42 PM	SiCl4 post valve closed
7/21/2010	5:20:42 PM	Main Vac valve closed
7/21/2010	5:20:42 PM	Bubbler valve closed
7/21/2010	5:20:42 PM	Bypass valve opened
7/21/2010	5:20:42 PM	Helium MFC set to  0.000000
7/21/2010	5:20:42 PM	H2 MFC set to  0.000000
7/21/2010	5:20:42 PM	BCl3 MFC set to  0.000000
7/21/2010	5:20:42 PM	PHl3 MFC set to  0.000000
7/21/2010	5:20:42 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:20:42 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:20:42 PM	Tube furnace set to 0
7/21/2010	5:21:08 PM	Helium valve closed
7/21/2010	5:21:08 PM	H2 valve closed
7/21/2010	5:21:08 PM	BCl3 valve closed
7/21/2010	5:21:08 PM	PH3 valve closed
7/21/2010	5:21:08 PM	SiCl4 pre valve closed
7/21/2010	5:21:08 PM	SiCl4 post valve closed
7/21/2010	5:21:08 PM	Bubbler valve closed
7/21/2010	5:21:08 PM	Main Vac valve opened
7/21/2010	5:21:08 PM	Bypass valve opened
7/21/2010	5:21:08 PM	Helium MFC set to  0.000000
7/21/2010	5:21:08 PM	H2 MFC set to  0.000000
7/21/2010	5:21:08 PM	BCl3 MFC set to  0.000000
7/21/2010	5:21:08 PM	PHl3 MFC set to  0.000000
7/21/2010	5:21:08 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:21:08 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:21:08 PM	Tube furnace set to 0
7/21/2010	5:26:08 PM	Helium valve closed
7/21/2010	5:26:08 PM	H2 valve closed
7/21/2010	5:26:08 PM	BCl3 valve closed
7/21/2010	5:26:08 PM	PH3 valve closed
7/21/2010	5:26:08 PM	SiCl4 pre valve closed
7/21/2010	5:26:08 PM	SiCl4 post valve closed
7/21/2010	5:26:08 PM	Bubbler valve closed
7/21/2010	5:26:08 PM	Main Vac valve opened
7/21/2010	5:26:08 PM	Bypass valve opened
7/21/2010	5:26:08 PM	Helium MFC set to  0.000000
7/21/2010	5:26:08 PM	H2 MFC set to  0.000000
7/21/2010	5:26:08 PM	BCl3 MFC set to  0.000000
7/21/2010	5:26:08 PM	PHl3 MFC set to  0.000000
7/21/2010	5:26:08 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:26:08 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:26:08 PM	Tube furnace set to 0
7/21/2010	5:26:09 PM	Run finished at 5:26 PM
7/21/2010	5:26:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/21/2010	5:31:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/21/2010	5:31:33 PM	Recipe started at 5:31 PM
7/21/2010	5:31:33 PM	Helium valve closed
7/21/2010	5:31:33 PM	H2 valve closed
7/21/2010	5:31:33 PM	BCl3 valve closed
7/21/2010	5:31:33 PM	PH3 valve closed
7/21/2010	5:31:33 PM	SiCl4 pre valve closed
7/21/2010	5:31:33 PM	SiCl4 post valve closed
7/21/2010	5:31:33 PM	Main Vac valve closed
7/21/2010	5:31:33 PM	Bubbler valve closed
7/21/2010	5:31:33 PM	Bypass valve opened
7/21/2010	5:31:33 PM	Helium MFC set to  0.000000
7/21/2010	5:31:33 PM	H2 MFC set to  0.000000
7/21/2010	5:31:33 PM	BCl3 MFC set to  0.000000
7/21/2010	5:31:33 PM	PHl3 MFC set to  0.000000
7/21/2010	5:31:33 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:31:33 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:31:33 PM	Tube furnace set to 0
7/21/2010	5:31:33 PM	Helium valve closed
7/21/2010	5:31:33 PM	H2 valve closed
7/21/2010	5:31:33 PM	BCl3 valve closed
7/21/2010	5:31:33 PM	PH3 valve closed
7/21/2010	5:31:33 PM	SiCl4 pre valve closed
7/21/2010	5:31:33 PM	SiCl4 post valve closed
7/21/2010	5:31:33 PM	Bubbler valve closed
7/21/2010	5:31:33 PM	Main Vac valve opened
7/21/2010	5:31:33 PM	Bypass valve opened
7/21/2010	5:31:33 PM	Helium MFC set to  0.000000
7/21/2010	5:31:33 PM	H2 MFC set to  0.000000
7/21/2010	5:31:33 PM	BCl3 MFC set to  0.000000
7/21/2010	5:31:33 PM	PHl3 MFC set to  0.000000
7/21/2010	5:31:33 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:31:33 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:31:33 PM	Tube furnace set to 0
7/21/2010	5:32:33 PM	H2 valve closed
7/21/2010	5:32:33 PM	BCl3 valve closed
7/21/2010	5:32:33 PM	PH3 valve closed
7/21/2010	5:32:33 PM	SiCl4 pre valve closed
7/21/2010	5:32:33 PM	SiCl4 post valve closed
7/21/2010	5:32:33 PM	Bubbler valve closed
7/21/2010	5:32:33 PM	Helium valve opened
7/21/2010	5:32:33 PM	Main Vac valve opened
7/21/2010	5:32:33 PM	Bypass valve opened
7/21/2010	5:32:33 PM	Helium MFC set to  100.000000
7/21/2010	5:32:33 PM	H2 MFC set to  0.000000
7/21/2010	5:32:34 PM	BCl3 MFC set to  0.000000
7/21/2010	5:32:34 PM	PHl3 MFC set to  0.000000
7/21/2010	5:32:34 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:32:34 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:32:34 PM	Tube furnace set to 0
7/21/2010	5:41:34 PM	Helium valve closed
7/21/2010	5:41:34 PM	H2 valve closed
7/21/2010	5:41:34 PM	BCl3 valve closed
7/21/2010	5:41:34 PM	PH3 valve closed
7/21/2010	5:41:34 PM	SiCl4 pre valve closed
7/21/2010	5:41:34 PM	SiCl4 post valve closed
7/21/2010	5:41:34 PM	Bubbler valve closed
7/21/2010	5:41:34 PM	Main Vac valve opened
7/21/2010	5:41:34 PM	Bypass valve opened
7/21/2010	5:41:34 PM	Helium MFC set to  0.000000
7/21/2010	5:41:34 PM	H2 MFC set to  0.000000
7/21/2010	5:41:34 PM	BCl3 MFC set to  0.000000
7/21/2010	5:41:34 PM	PHl3 MFC set to  0.000000
7/21/2010	5:41:34 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:41:34 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:41:34 PM	Tube furnace set to 0
7/21/2010	5:42:34 PM	H2 valve closed
7/21/2010	5:42:34 PM	BCl3 valve closed
7/21/2010	5:42:34 PM	PH3 valve closed
7/21/2010	5:42:34 PM	SiCl4 pre valve closed
7/21/2010	5:42:34 PM	SiCl4 post valve closed
7/21/2010	5:42:34 PM	Bubbler valve closed
7/21/2010	5:42:34 PM	Helium valve opened
7/21/2010	5:42:34 PM	Main Vac valve opened
7/21/2010	5:42:34 PM	Bypass valve opened
7/21/2010	5:42:34 PM	Helium MFC set to  100.000000
7/21/2010	5:42:34 PM	H2 MFC set to  0.000000
7/21/2010	5:42:34 PM	BCl3 MFC set to  0.000000
7/21/2010	5:42:34 PM	PHl3 MFC set to  0.000000
7/21/2010	5:42:34 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:42:34 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:42:34 PM	Tube furnace set to 0
7/21/2010	5:51:34 PM	Helium valve closed
7/21/2010	5:51:34 PM	H2 valve closed
7/21/2010	5:51:34 PM	BCl3 valve closed
7/21/2010	5:51:34 PM	PH3 valve closed
7/21/2010	5:51:34 PM	SiCl4 pre valve closed
7/21/2010	5:51:34 PM	SiCl4 post valve closed
7/21/2010	5:51:34 PM	Bubbler valve closed
7/21/2010	5:51:34 PM	Main Vac valve opened
7/21/2010	5:51:34 PM	Bypass valve opened
7/21/2010	5:51:34 PM	Helium MFC set to  0.000000
7/21/2010	5:51:34 PM	H2 MFC set to  0.000000
7/21/2010	5:51:34 PM	BCl3 MFC set to  0.000000
7/21/2010	5:51:34 PM	PHl3 MFC set to  0.000000
7/21/2010	5:51:34 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:51:34 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:51:34 PM	Tube furnace set to 0
7/21/2010	5:52:34 PM	H2 valve closed
7/21/2010	5:52:34 PM	BCl3 valve closed
7/21/2010	5:52:34 PM	PH3 valve closed
7/21/2010	5:52:34 PM	SiCl4 pre valve closed
7/21/2010	5:52:34 PM	SiCl4 post valve closed
7/21/2010	5:52:34 PM	Bubbler valve closed
7/21/2010	5:52:34 PM	Helium valve opened
7/21/2010	5:52:34 PM	Main Vac valve opened
7/21/2010	5:52:34 PM	Bypass valve opened
7/21/2010	5:52:34 PM	Helium MFC set to  100.000000
7/21/2010	5:52:34 PM	H2 MFC set to  0.000000
7/21/2010	5:52:34 PM	BCl3 MFC set to  0.000000
7/21/2010	5:52:34 PM	PHl3 MFC set to  0.000000
7/21/2010	5:52:34 PM	SiCl4 MFC set to  0.000000
7/21/2010	5:52:34 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	5:52:34 PM	Tube furnace set to 0
7/21/2010	6:01:34 PM	Helium valve closed
7/21/2010	6:01:34 PM	H2 valve closed
7/21/2010	6:01:34 PM	BCl3 valve closed
7/21/2010	6:01:34 PM	PH3 valve closed
7/21/2010	6:01:34 PM	SiCl4 pre valve closed
7/21/2010	6:01:34 PM	SiCl4 post valve closed
7/21/2010	6:01:34 PM	Bubbler valve closed
7/21/2010	6:01:34 PM	Main Vac valve opened
7/21/2010	6:01:34 PM	Bypass valve opened
7/21/2010	6:01:34 PM	Helium MFC set to  0.000000
7/21/2010	6:01:34 PM	H2 MFC set to  0.000000
7/21/2010	6:01:34 PM	BCl3 MFC set to  0.000000
7/21/2010	6:01:34 PM	PHl3 MFC set to  0.000000
7/21/2010	6:01:34 PM	SiCl4 MFC set to  0.000000
7/21/2010	6:01:34 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	6:01:35 PM	Tube furnace set to 0
7/21/2010	6:01:36 PM	Run finished at 6:01 PM
7/21/2010	6:01:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/21/2010	7:22:12 PM	Helium valve opened
7/21/2010	7:22:15 PM	Helium valve closed
7/21/2010	7:23:10 PM	Helium valve opened
7/21/2010	7:23:20 PM	Helium MFC set to  1.000000
7/21/2010	7:23:39 PM	Helium MFC set to  0.000000
7/21/2010	7:23:41 PM	Helium valve closed
7/21/2010	7:23:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/21/2010	7:23:50 PM	Recipe started at 7:23 PM
7/21/2010	7:23:50 PM	Helium valve closed
7/21/2010	7:23:50 PM	H2 valve closed
7/21/2010	7:23:50 PM	BCl3 valve closed
7/21/2010	7:23:50 PM	PH3 valve closed
7/21/2010	7:23:51 PM	SiCl4 pre valve closed
7/21/2010	7:23:51 PM	SiCl4 post valve closed
7/21/2010	7:23:51 PM	Main Vac valve closed
7/21/2010	7:23:51 PM	Bubbler valve closed
7/21/2010	7:23:51 PM	Bypass valve opened
7/21/2010	7:23:51 PM	Helium MFC set to  0.000000
7/21/2010	7:23:51 PM	H2 MFC set to  0.000000
7/21/2010	7:23:51 PM	BCl3 MFC set to  0.000000
7/21/2010	7:23:51 PM	PHl3 MFC set to  0.000000
7/21/2010	7:23:51 PM	SiCl4 MFC set to  0.000000
7/21/2010	7:23:51 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	7:23:51 PM	Tube furnace set to 0
7/21/2010	7:23:51 PM	Helium valve closed
7/21/2010	7:23:51 PM	H2 valve closed
7/21/2010	7:23:51 PM	BCl3 valve closed
7/21/2010	7:23:51 PM	PH3 valve closed
7/21/2010	7:23:51 PM	SiCl4 pre valve closed
7/21/2010	7:23:51 PM	SiCl4 post valve closed
7/21/2010	7:23:51 PM	Bubbler valve closed
7/21/2010	7:23:51 PM	Main Vac valve opened
7/21/2010	7:23:51 PM	Bypass valve opened
7/21/2010	7:23:51 PM	Helium MFC set to  0.000000
7/21/2010	7:23:51 PM	H2 MFC set to  0.000000
7/21/2010	7:23:51 PM	BCl3 MFC set to  0.000000
7/21/2010	7:23:51 PM	PHl3 MFC set to  0.000000
7/21/2010	7:23:51 PM	SiCl4 MFC set to  0.000000
7/21/2010	7:23:51 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	7:23:51 PM	Tube furnace set to 0
7/21/2010	7:24:51 PM	H2 valve closed
7/21/2010	7:24:51 PM	BCl3 valve closed
7/21/2010	7:24:51 PM	PH3 valve closed
7/21/2010	7:24:51 PM	SiCl4 pre valve closed
7/21/2010	7:24:51 PM	SiCl4 post valve closed
7/21/2010	7:24:51 PM	Bubbler valve closed
7/21/2010	7:24:51 PM	Helium valve opened
7/21/2010	7:24:51 PM	Main Vac valve opened
7/21/2010	7:24:51 PM	Bypass valve opened
7/21/2010	7:24:51 PM	Helium MFC set to  100.000000
7/21/2010	7:24:51 PM	H2 MFC set to  0.000000
7/21/2010	7:24:51 PM	BCl3 MFC set to  0.000000
7/21/2010	7:24:51 PM	PHl3 MFC set to  0.000000
7/21/2010	7:24:51 PM	SiCl4 MFC set to  0.000000
7/21/2010	7:24:51 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	7:24:51 PM	Tube furnace set to 0
7/21/2010	7:33:51 PM	Helium valve closed
7/21/2010	7:33:51 PM	H2 valve closed
7/21/2010	7:33:51 PM	BCl3 valve closed
7/21/2010	7:33:51 PM	PH3 valve closed
7/21/2010	7:33:51 PM	SiCl4 pre valve closed
7/21/2010	7:33:51 PM	SiCl4 post valve closed
7/21/2010	7:33:51 PM	Bubbler valve closed
7/21/2010	7:33:51 PM	Main Vac valve opened
7/21/2010	7:33:51 PM	Bypass valve opened
7/21/2010	7:33:51 PM	Helium MFC set to  0.000000
7/21/2010	7:33:51 PM	H2 MFC set to  0.000000
7/21/2010	7:33:51 PM	BCl3 MFC set to  0.000000
7/21/2010	7:33:51 PM	PHl3 MFC set to  0.000000
7/21/2010	7:33:51 PM	SiCl4 MFC set to  0.000000
7/21/2010	7:33:51 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	7:33:52 PM	Tube furnace set to 0
7/21/2010	7:34:52 PM	H2 valve closed
7/21/2010	7:34:52 PM	BCl3 valve closed
7/21/2010	7:34:52 PM	PH3 valve closed
7/21/2010	7:34:52 PM	SiCl4 pre valve closed
7/21/2010	7:34:52 PM	SiCl4 post valve closed
7/21/2010	7:34:52 PM	Bubbler valve closed
7/21/2010	7:34:52 PM	Helium valve opened
7/21/2010	7:34:52 PM	Main Vac valve opened
7/21/2010	7:34:52 PM	Bypass valve opened
7/21/2010	7:34:52 PM	Helium MFC set to  100.000000
7/21/2010	7:34:52 PM	H2 MFC set to  0.000000
7/21/2010	7:34:52 PM	BCl3 MFC set to  0.000000
7/21/2010	7:34:52 PM	PHl3 MFC set to  0.000000
7/21/2010	7:34:52 PM	SiCl4 MFC set to  0.000000
7/21/2010	7:34:52 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	7:34:52 PM	Tube furnace set to 0
7/21/2010	7:43:52 PM	Helium valve closed
7/21/2010	7:43:52 PM	H2 valve closed
7/21/2010	7:43:52 PM	BCl3 valve closed
7/21/2010	7:43:52 PM	PH3 valve closed
7/21/2010	7:43:52 PM	SiCl4 pre valve closed
7/21/2010	7:43:52 PM	SiCl4 post valve closed
7/21/2010	7:43:52 PM	Bubbler valve closed
7/21/2010	7:43:52 PM	Main Vac valve opened
7/21/2010	7:43:52 PM	Bypass valve opened
7/21/2010	7:43:52 PM	Helium MFC set to  0.000000
7/21/2010	7:43:52 PM	H2 MFC set to  0.000000
7/21/2010	7:43:52 PM	BCl3 MFC set to  0.000000
7/21/2010	7:43:52 PM	PHl3 MFC set to  0.000000
7/21/2010	7:43:52 PM	SiCl4 MFC set to  0.000000
7/21/2010	7:43:52 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	7:43:52 PM	Tube furnace set to 0
7/21/2010	7:44:52 PM	H2 valve closed
7/21/2010	7:44:52 PM	BCl3 valve closed
7/21/2010	7:44:52 PM	PH3 valve closed
7/21/2010	7:44:52 PM	SiCl4 pre valve closed
7/21/2010	7:44:52 PM	SiCl4 post valve closed
7/21/2010	7:44:52 PM	Bubbler valve closed
7/21/2010	7:44:52 PM	Helium valve opened
7/21/2010	7:44:52 PM	Main Vac valve opened
7/21/2010	7:44:52 PM	Bypass valve opened
7/21/2010	7:44:52 PM	Helium MFC set to  100.000000
7/21/2010	7:44:52 PM	H2 MFC set to  0.000000
7/21/2010	7:44:52 PM	BCl3 MFC set to  0.000000
7/21/2010	7:44:52 PM	PHl3 MFC set to  0.000000
7/21/2010	7:44:52 PM	SiCl4 MFC set to  0.000000
7/21/2010	7:44:52 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	7:44:52 PM	Tube furnace set to 0
7/21/2010	7:53:52 PM	Helium valve closed
7/21/2010	7:53:52 PM	H2 valve closed
7/21/2010	7:53:52 PM	BCl3 valve closed
7/21/2010	7:53:52 PM	PH3 valve closed
7/21/2010	7:53:52 PM	SiCl4 pre valve closed
7/21/2010	7:53:52 PM	SiCl4 post valve closed
7/21/2010	7:53:52 PM	Bubbler valve closed
7/21/2010	7:53:52 PM	Main Vac valve opened
7/21/2010	7:53:52 PM	Bypass valve opened
7/21/2010	7:53:52 PM	Helium MFC set to  0.000000
7/21/2010	7:53:52 PM	H2 MFC set to  0.000000
7/21/2010	7:53:52 PM	BCl3 MFC set to  0.000000
7/21/2010	7:53:52 PM	PHl3 MFC set to  0.000000
7/21/2010	7:53:52 PM	SiCl4 MFC set to  0.000000
7/21/2010	7:53:52 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	7:53:52 PM	Tube furnace set to 0
7/21/2010	7:53:53 PM	Run finished at 7:53 PM
7/21/2010	7:53:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/21/2010	8:03:44 PM	Recipe started at 8:03 PM
7/21/2010	8:03:44 PM	Helium valve closed
7/21/2010	8:03:44 PM	BCl3 valve closed
7/21/2010	8:03:44 PM	PH3 valve closed
7/21/2010	8:03:44 PM	SiCl4 pre valve closed
7/21/2010	8:03:44 PM	SiCl4 post valve closed
7/21/2010	8:03:44 PM	Main Vac valve closed
7/21/2010	8:03:44 PM	Bypass valve closed
7/21/2010	8:03:44 PM	Bubbler valve closed
7/21/2010	8:03:44 PM	H2 valve opened
7/21/2010	8:03:44 PM	Helium MFC set to  0.000000
7/21/2010	8:03:44 PM	H2 MFC set to  500.000000
7/21/2010	8:03:44 PM	BCl3 MFC set to  0.000000
7/21/2010	8:03:44 PM	PHl3 MFC set to  0.000000
7/21/2010	8:03:44 PM	SiCl4 MFC set to  0.000000
7/21/2010	8:03:44 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	8:03:45 PM	Tube furnace set to 0
7/21/2010	8:05:07 PM	Helium valve closed
7/21/2010	8:05:07 PM	BCl3 valve closed
7/21/2010	8:05:07 PM	PH3 valve closed
7/21/2010	8:05:07 PM	SiCl4 pre valve closed
7/21/2010	8:05:07 PM	SiCl4 post valve closed
7/21/2010	8:05:07 PM	Main Vac valve closed
7/21/2010	8:05:07 PM	Bypass valve closed
7/21/2010	8:05:07 PM	H2 valve opened
7/21/2010	8:05:07 PM	Bubbler valve opened
7/21/2010	8:05:07 PM	Helium MFC set to  0.000000
7/21/2010	8:05:07 PM	H2 MFC set to  500.000000
7/21/2010	8:05:07 PM	BCl3 MFC set to  0.000000
7/21/2010	8:05:07 PM	PHl3 MFC set to  0.000000
7/21/2010	8:05:07 PM	SiCl4 MFC set to  0.000000
7/21/2010	8:05:07 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	8:05:07 PM	Tube furnace set to 1000
7/21/2010	8:25:07 PM	Helium valve closed
7/21/2010	8:25:07 PM	BCl3 valve closed
7/21/2010	8:25:07 PM	Main Vac valve closed
7/21/2010	8:25:07 PM	Bypass valve closed
7/21/2010	8:25:07 PM	H2 valve opened
7/21/2010	8:25:07 PM	PH3 valve opened
7/21/2010	8:25:07 PM	SiCl4 pre valve opened
7/21/2010	8:25:07 PM	SiCl4 post valve opened
7/21/2010	8:25:07 PM	Bubbler valve opened
7/21/2010	8:25:07 PM	Helium MFC set to  0.000000
7/21/2010	8:25:07 PM	H2 MFC set to  500.000000
7/21/2010	8:25:07 PM	BCl3 MFC set to  0.000000
7/21/2010	8:25:07 PM	PHl3 MFC set to  0.400000
7/21/2010	8:25:07 PM	SiCl4 MFC set to  50.000000
7/21/2010	8:25:07 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	8:25:07 PM	Tube furnace set to 1000
7/21/2010	8:45:07 PM	H2 valve closed
7/21/2010	8:45:07 PM	BCl3 valve closed
7/21/2010	8:45:07 PM	PH3 valve closed
7/21/2010	8:45:07 PM	SiCl4 pre valve closed
7/21/2010	8:45:07 PM	SiCl4 post valve closed
7/21/2010	8:45:07 PM	Main Vac valve closed
7/21/2010	8:45:07 PM	Bypass valve closed
7/21/2010	8:45:07 PM	Helium valve opened
7/21/2010	8:45:07 PM	Bubbler valve opened
7/21/2010	8:45:07 PM	Helium MFC set to  500.000000
7/21/2010	8:45:07 PM	H2 MFC set to  0.000000
7/21/2010	8:45:07 PM	BCl3 MFC set to  0.000000
7/21/2010	8:45:07 PM	PHl3 MFC set to  0.000000
7/21/2010	8:45:07 PM	SiCl4 MFC set to  0.000000
7/21/2010	8:45:07 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	8:45:07 PM	Tube furnace set to 0
7/21/2010	9:05:07 PM	Helium valve closed
7/21/2010	9:05:07 PM	H2 valve closed
7/21/2010	9:05:07 PM	BCl3 valve closed
7/21/2010	9:05:07 PM	PH3 valve closed
7/21/2010	9:05:07 PM	SiCl4 pre valve closed
7/21/2010	9:05:07 PM	SiCl4 post valve closed
7/21/2010	9:05:07 PM	Main Vac valve closed
7/21/2010	9:05:07 PM	Bypass valve closed
7/21/2010	9:05:07 PM	Bubbler valve closed
7/21/2010	9:05:07 PM	Helium MFC set to  0.000000
7/21/2010	9:05:07 PM	H2 MFC set to  0.000000
7/21/2010	9:05:07 PM	BCl3 MFC set to  0.000000
7/21/2010	9:05:07 PM	PHl3 MFC set to  0.000000
7/21/2010	9:05:07 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:05:07 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:05:07 PM	Tube furnace set to 0
7/21/2010	9:05:08 PM	Run finished at 9:05 PM
7/21/2010	9:26:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/21/2010	9:26:33 PM	Recipe started at 9:26 PM
7/21/2010	9:26:33 PM	Helium valve closed
7/21/2010	9:26:33 PM	H2 valve closed
7/21/2010	9:26:33 PM	BCl3 valve closed
7/21/2010	9:26:33 PM	PH3 valve closed
7/21/2010	9:26:33 PM	SiCl4 pre valve closed
7/21/2010	9:26:33 PM	SiCl4 post valve closed
7/21/2010	9:26:33 PM	Main Vac valve closed
7/21/2010	9:26:33 PM	Bubbler valve closed
7/21/2010	9:26:33 PM	Bypass valve opened
7/21/2010	9:26:33 PM	Helium MFC set to  0.000000
7/21/2010	9:26:33 PM	H2 MFC set to  0.000000
7/21/2010	9:26:33 PM	BCl3 MFC set to  0.000000
7/21/2010	9:26:33 PM	PHl3 MFC set to  0.000000
7/21/2010	9:26:33 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:26:33 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:26:34 PM	Tube furnace set to 0
7/21/2010	9:27:10 PM	Helium valve closed
7/21/2010	9:27:10 PM	H2 valve closed
7/21/2010	9:27:10 PM	BCl3 valve closed
7/21/2010	9:27:10 PM	PH3 valve closed
7/21/2010	9:27:10 PM	SiCl4 pre valve closed
7/21/2010	9:27:10 PM	SiCl4 post valve closed
7/21/2010	9:27:10 PM	Bubbler valve closed
7/21/2010	9:27:10 PM	Main Vac valve opened
7/21/2010	9:27:10 PM	Bypass valve opened
7/21/2010	9:27:10 PM	Helium MFC set to  0.000000
7/21/2010	9:27:10 PM	H2 MFC set to  0.000000
7/21/2010	9:27:10 PM	BCl3 MFC set to  0.000000
7/21/2010	9:27:10 PM	PHl3 MFC set to  0.000000
7/21/2010	9:27:10 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:27:10 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:27:10 PM	Tube furnace set to 0
7/21/2010	9:27:10 PM	Run finished at 9:27 PM
7/21/2010	9:27:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/21/2010	9:27:52 PM	Bypass valve closed
7/21/2010	9:27:57 PM	Main Vac valve closed
7/21/2010	9:28:12 PM	Main Vac valve opened
7/21/2010	9:28:53 PM	Main Vac valve closed
7/21/2010	9:29:08 PM	Main Vac valve opened
7/21/2010	9:31:42 PM	Main Vac valve closed
7/21/2010	9:32:03 PM	Main Vac valve opened
7/21/2010	9:32:49 PM	Main Vac valve closed
7/21/2010	9:33:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/21/2010	9:33:10 PM	Recipe started at 9:33 PM
7/21/2010	9:33:10 PM	H2 valve closed
7/21/2010	9:33:10 PM	BCl3 valve closed
7/21/2010	9:33:10 PM	PH3 valve closed
7/21/2010	9:33:10 PM	SiCl4 pre valve closed
7/21/2010	9:33:10 PM	SiCl4 post valve closed
7/21/2010	9:33:10 PM	Main Vac valve closed
7/21/2010	9:33:10 PM	Bypass valve closed
7/21/2010	9:33:10 PM	Bubbler valve closed
7/21/2010	9:33:10 PM	Helium valve opened
7/21/2010	9:33:10 PM	Helium MFC set to  500.000000
7/21/2010	9:33:10 PM	H2 MFC set to  0.000000
7/21/2010	9:33:10 PM	BCl3 MFC set to  0.000000
7/21/2010	9:33:10 PM	PHl3 MFC set to  0.000000
7/21/2010	9:33:10 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:33:10 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:33:11 PM	Tube furnace set to 0
7/21/2010	9:34:28 PM	Helium valve closed
7/21/2010	9:34:28 PM	H2 valve closed
7/21/2010	9:34:28 PM	BCl3 valve closed
7/21/2010	9:34:28 PM	PH3 valve closed
7/21/2010	9:34:28 PM	SiCl4 pre valve closed
7/21/2010	9:34:28 PM	SiCl4 post valve closed
7/21/2010	9:34:28 PM	Main Vac valve closed
7/21/2010	9:34:28 PM	Bypass valve closed
7/21/2010	9:34:28 PM	Bubbler valve closed
7/21/2010	9:34:28 PM	Helium MFC set to  0.000000
7/21/2010	9:34:28 PM	H2 MFC set to  0.000000
7/21/2010	9:34:28 PM	BCl3 MFC set to  0.000000
7/21/2010	9:34:28 PM	PHl3 MFC set to  0.000000
7/21/2010	9:34:28 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:34:28 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:34:28 PM	Tube furnace set to 0
7/21/2010	9:34:29 PM	Run finished at 9:34 PM
7/21/2010	9:34:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/21/2010	9:39:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/21/2010	9:39:09 PM	Recipe started at 9:39 PM
7/21/2010	9:39:09 PM	Helium valve closed
7/21/2010	9:39:09 PM	H2 valve closed
7/21/2010	9:39:09 PM	BCl3 valve closed
7/21/2010	9:39:09 PM	PH3 valve closed
7/21/2010	9:39:09 PM	SiCl4 pre valve closed
7/21/2010	9:39:09 PM	SiCl4 post valve closed
7/21/2010	9:39:09 PM	Main Vac valve closed
7/21/2010	9:39:09 PM	Bubbler valve closed
7/21/2010	9:39:09 PM	Bypass valve opened
7/21/2010	9:39:09 PM	Helium MFC set to  0.000000
7/21/2010	9:39:09 PM	H2 MFC set to  0.000000
7/21/2010	9:39:09 PM	BCl3 MFC set to  0.000000
7/21/2010	9:39:09 PM	PHl3 MFC set to  0.000000
7/21/2010	9:39:09 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:39:09 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:39:09 PM	Tube furnace set to 0
7/21/2010	9:39:44 PM	Helium valve closed
7/21/2010	9:39:44 PM	H2 valve closed
7/21/2010	9:39:44 PM	BCl3 valve closed
7/21/2010	9:39:44 PM	PH3 valve closed
7/21/2010	9:39:44 PM	SiCl4 pre valve closed
7/21/2010	9:39:44 PM	SiCl4 post valve closed
7/21/2010	9:39:44 PM	Bubbler valve closed
7/21/2010	9:39:44 PM	Main Vac valve opened
7/21/2010	9:39:44 PM	Bypass valve opened
7/21/2010	9:39:44 PM	Helium MFC set to  0.000000
7/21/2010	9:39:44 PM	H2 MFC set to  0.000000
7/21/2010	9:39:44 PM	BCl3 MFC set to  0.000000
7/21/2010	9:39:44 PM	PHl3 MFC set to  0.000000
7/21/2010	9:39:44 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:39:44 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:39:44 PM	Tube furnace set to 0
7/21/2010	9:39:44 PM	Run finished at 9:39 PM
7/21/2010	9:39:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/21/2010	9:40:19 PM	Bypass valve closed
7/21/2010	9:40:22 PM	Main Vac valve closed
7/21/2010	9:40:53 PM	Main Vac valve opened
7/21/2010	9:41:19 PM	Bypass valve opened
7/21/2010	9:41:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/21/2010	9:41:36 PM	Recipe started at 9:41 PM
7/21/2010	9:41:36 PM	H2 valve closed
7/21/2010	9:41:36 PM	BCl3 valve closed
7/21/2010	9:41:36 PM	PH3 valve closed
7/21/2010	9:41:36 PM	SiCl4 pre valve closed
7/21/2010	9:41:36 PM	SiCl4 post valve closed
7/21/2010	9:41:36 PM	Main Vac valve closed
7/21/2010	9:41:36 PM	Bypass valve closed
7/21/2010	9:41:36 PM	Bubbler valve closed
7/21/2010	9:41:36 PM	Helium valve opened
7/21/2010	9:41:36 PM	Helium MFC set to  500.000000
7/21/2010	9:41:36 PM	H2 MFC set to  0.000000
7/21/2010	9:41:36 PM	BCl3 MFC set to  0.000000
7/21/2010	9:41:36 PM	PHl3 MFC set to  0.000000
7/21/2010	9:41:36 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:41:36 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:41:37 PM	Tube furnace set to 0
7/21/2010	9:42:57 PM	Helium valve closed
7/21/2010	9:42:57 PM	H2 valve closed
7/21/2010	9:42:57 PM	BCl3 valve closed
7/21/2010	9:42:57 PM	PH3 valve closed
7/21/2010	9:42:57 PM	SiCl4 pre valve closed
7/21/2010	9:42:57 PM	SiCl4 post valve closed
7/21/2010	9:42:57 PM	Main Vac valve closed
7/21/2010	9:42:57 PM	Bypass valve closed
7/21/2010	9:42:57 PM	Bubbler valve closed
7/21/2010	9:42:57 PM	Helium MFC set to  0.000000
7/21/2010	9:42:57 PM	H2 MFC set to  0.000000
7/21/2010	9:42:57 PM	BCl3 MFC set to  0.000000
7/21/2010	9:42:57 PM	PHl3 MFC set to  0.000000
7/21/2010	9:42:57 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:42:57 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:42:58 PM	Tube furnace set to 0
7/21/2010	9:43:13 PM	Helium valve closed
7/21/2010	9:43:13 PM	H2 valve closed
7/21/2010	9:43:13 PM	BCl3 valve closed
7/21/2010	9:43:13 PM	PH3 valve closed
7/21/2010	9:43:13 PM	SiCl4 pre valve closed
7/21/2010	9:43:13 PM	SiCl4 post valve closed
7/21/2010	9:43:13 PM	Main Vac valve closed
7/21/2010	9:43:13 PM	Bubbler valve closed
7/21/2010	9:43:13 PM	Bypass valve opened
7/21/2010	9:43:13 PM	Helium MFC set to  0.000000
7/21/2010	9:43:13 PM	H2 MFC set to  0.000000
7/21/2010	9:43:13 PM	BCl3 MFC set to  0.000000
7/21/2010	9:43:13 PM	PHl3 MFC set to  0.000000
7/21/2010	9:43:13 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:43:13 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:43:13 PM	Tube furnace set to 0
7/21/2010	9:43:38 PM	Helium valve closed
7/21/2010	9:43:38 PM	H2 valve closed
7/21/2010	9:43:38 PM	BCl3 valve closed
7/21/2010	9:43:38 PM	PH3 valve closed
7/21/2010	9:43:38 PM	SiCl4 pre valve closed
7/21/2010	9:43:38 PM	SiCl4 post valve closed
7/21/2010	9:43:38 PM	Bubbler valve closed
7/21/2010	9:43:38 PM	Main Vac valve opened
7/21/2010	9:43:38 PM	Bypass valve opened
7/21/2010	9:43:38 PM	Helium MFC set to  0.000000
7/21/2010	9:43:38 PM	H2 MFC set to  0.000000
7/21/2010	9:43:38 PM	BCl3 MFC set to  0.000000
7/21/2010	9:43:38 PM	PHl3 MFC set to  0.000000
7/21/2010	9:43:38 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:43:38 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:43:38 PM	Tube furnace set to 0
7/21/2010	9:48:38 PM	H2 valve closed
7/21/2010	9:48:38 PM	BCl3 valve closed
7/21/2010	9:48:38 PM	PH3 valve closed
7/21/2010	9:48:38 PM	SiCl4 pre valve closed
7/21/2010	9:48:38 PM	SiCl4 post valve closed
7/21/2010	9:48:38 PM	Main Vac valve closed
7/21/2010	9:48:38 PM	Bypass valve closed
7/21/2010	9:48:38 PM	Bubbler valve closed
7/21/2010	9:48:38 PM	Helium valve opened
7/21/2010	9:48:38 PM	Helium MFC set to  500.000000
7/21/2010	9:48:38 PM	H2 MFC set to  0.000000
7/21/2010	9:48:38 PM	BCl3 MFC set to  0.000000
7/21/2010	9:48:38 PM	PHl3 MFC set to  0.000000
7/21/2010	9:48:39 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:48:39 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:48:39 PM	Tube furnace set to 0
7/21/2010	9:50:00 PM	Helium valve closed
7/21/2010	9:50:00 PM	H2 valve closed
7/21/2010	9:50:00 PM	BCl3 valve closed
7/21/2010	9:50:00 PM	PH3 valve closed
7/21/2010	9:50:00 PM	SiCl4 pre valve closed
7/21/2010	9:50:00 PM	SiCl4 post valve closed
7/21/2010	9:50:00 PM	Main Vac valve closed
7/21/2010	9:50:00 PM	Bypass valve closed
7/21/2010	9:50:00 PM	Bubbler valve closed
7/21/2010	9:50:00 PM	Helium MFC set to  0.000000
7/21/2010	9:50:00 PM	H2 MFC set to  0.000000
7/21/2010	9:50:00 PM	BCl3 MFC set to  0.000000
7/21/2010	9:50:00 PM	PHl3 MFC set to  0.000000
7/21/2010	9:50:00 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:50:00 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:50:00 PM	Tube furnace set to 0
7/21/2010	9:50:15 PM	Helium valve closed
7/21/2010	9:50:15 PM	H2 valve closed
7/21/2010	9:50:15 PM	BCl3 valve closed
7/21/2010	9:50:15 PM	PH3 valve closed
7/21/2010	9:50:15 PM	SiCl4 pre valve closed
7/21/2010	9:50:15 PM	SiCl4 post valve closed
7/21/2010	9:50:15 PM	Main Vac valve closed
7/21/2010	9:50:15 PM	Bubbler valve closed
7/21/2010	9:50:15 PM	Bypass valve opened
7/21/2010	9:50:15 PM	Helium MFC set to  0.000000
7/21/2010	9:50:15 PM	H2 MFC set to  0.000000
7/21/2010	9:50:15 PM	BCl3 MFC set to  0.000000
7/21/2010	9:50:15 PM	PHl3 MFC set to  0.000000
7/21/2010	9:50:15 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:50:15 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:50:15 PM	Tube furnace set to 0
7/21/2010	9:50:41 PM	Helium valve closed
7/21/2010	9:50:41 PM	H2 valve closed
7/21/2010	9:50:41 PM	BCl3 valve closed
7/21/2010	9:50:41 PM	PH3 valve closed
7/21/2010	9:50:41 PM	SiCl4 pre valve closed
7/21/2010	9:50:41 PM	SiCl4 post valve closed
7/21/2010	9:50:41 PM	Bubbler valve closed
7/21/2010	9:50:41 PM	Main Vac valve opened
7/21/2010	9:50:41 PM	Bypass valve opened
7/21/2010	9:50:41 PM	Helium MFC set to  0.000000
7/21/2010	9:50:41 PM	H2 MFC set to  0.000000
7/21/2010	9:50:41 PM	BCl3 MFC set to  0.000000
7/21/2010	9:50:41 PM	PHl3 MFC set to  0.000000
7/21/2010	9:50:41 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:50:41 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:50:41 PM	Tube furnace set to 0
7/21/2010	9:55:41 PM	H2 valve closed
7/21/2010	9:55:41 PM	BCl3 valve closed
7/21/2010	9:55:41 PM	PH3 valve closed
7/21/2010	9:55:41 PM	SiCl4 pre valve closed
7/21/2010	9:55:41 PM	SiCl4 post valve closed
7/21/2010	9:55:41 PM	Main Vac valve closed
7/21/2010	9:55:41 PM	Bypass valve closed
7/21/2010	9:55:41 PM	Bubbler valve closed
7/21/2010	9:55:41 PM	Helium valve opened
7/21/2010	9:55:41 PM	Helium MFC set to  500.000000
7/21/2010	9:55:41 PM	H2 MFC set to  0.000000
7/21/2010	9:55:41 PM	BCl3 MFC set to  0.000000
7/21/2010	9:55:41 PM	PHl3 MFC set to  0.000000
7/21/2010	9:55:41 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:55:41 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:55:41 PM	Tube furnace set to 0
7/21/2010	9:57:02 PM	Helium valve closed
7/21/2010	9:57:02 PM	H2 valve closed
7/21/2010	9:57:02 PM	BCl3 valve closed
7/21/2010	9:57:02 PM	PH3 valve closed
7/21/2010	9:57:02 PM	SiCl4 pre valve closed
7/21/2010	9:57:02 PM	SiCl4 post valve closed
7/21/2010	9:57:02 PM	Main Vac valve closed
7/21/2010	9:57:02 PM	Bypass valve closed
7/21/2010	9:57:02 PM	Bubbler valve closed
7/21/2010	9:57:02 PM	Helium MFC set to  0.000000
7/21/2010	9:57:02 PM	H2 MFC set to  0.000000
7/21/2010	9:57:02 PM	BCl3 MFC set to  0.000000
7/21/2010	9:57:02 PM	PHl3 MFC set to  0.000000
7/21/2010	9:57:02 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:57:02 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:57:02 PM	Tube furnace set to 0
7/21/2010	9:57:17 PM	Helium valve closed
7/21/2010	9:57:17 PM	H2 valve closed
7/21/2010	9:57:17 PM	BCl3 valve closed
7/21/2010	9:57:17 PM	PH3 valve closed
7/21/2010	9:57:17 PM	SiCl4 pre valve closed
7/21/2010	9:57:17 PM	SiCl4 post valve closed
7/21/2010	9:57:17 PM	Main Vac valve closed
7/21/2010	9:57:17 PM	Bubbler valve closed
7/21/2010	9:57:17 PM	Bypass valve opened
7/21/2010	9:57:17 PM	Helium MFC set to  0.000000
7/21/2010	9:57:17 PM	H2 MFC set to  0.000000
7/21/2010	9:57:17 PM	BCl3 MFC set to  0.000000
7/21/2010	9:57:17 PM	PHl3 MFC set to  0.000000
7/21/2010	9:57:17 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:57:17 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:57:18 PM	Tube furnace set to 0
7/21/2010	9:57:43 PM	Helium valve closed
7/21/2010	9:57:43 PM	H2 valve closed
7/21/2010	9:57:43 PM	BCl3 valve closed
7/21/2010	9:57:43 PM	PH3 valve closed
7/21/2010	9:57:43 PM	SiCl4 pre valve closed
7/21/2010	9:57:43 PM	SiCl4 post valve closed
7/21/2010	9:57:43 PM	Bubbler valve closed
7/21/2010	9:57:43 PM	Main Vac valve opened
7/21/2010	9:57:43 PM	Bypass valve opened
7/21/2010	9:57:43 PM	Helium MFC set to  0.000000
7/21/2010	9:57:43 PM	H2 MFC set to  0.000000
7/21/2010	9:57:43 PM	BCl3 MFC set to  0.000000
7/21/2010	9:57:43 PM	PHl3 MFC set to  0.000000
7/21/2010	9:57:43 PM	SiCl4 MFC set to  0.000000
7/21/2010	9:57:43 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	9:57:44 PM	Tube furnace set to 0
7/21/2010	10:02:44 PM	Helium valve closed
7/21/2010	10:02:44 PM	H2 valve closed
7/21/2010	10:02:44 PM	BCl3 valve closed
7/21/2010	10:02:44 PM	PH3 valve closed
7/21/2010	10:02:44 PM	SiCl4 pre valve closed
7/21/2010	10:02:44 PM	SiCl4 post valve closed
7/21/2010	10:02:44 PM	Bubbler valve closed
7/21/2010	10:02:44 PM	Main Vac valve opened
7/21/2010	10:02:44 PM	Bypass valve opened
7/21/2010	10:02:44 PM	Helium MFC set to  0.000000
7/21/2010	10:02:44 PM	H2 MFC set to  0.000000
7/21/2010	10:02:44 PM	BCl3 MFC set to  0.000000
7/21/2010	10:02:44 PM	PHl3 MFC set to  0.000000
7/21/2010	10:02:44 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:02:44 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:02:44 PM	Tube furnace set to 0
7/21/2010	10:02:45 PM	Run finished at 10:02 PM
7/21/2010	10:02:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/21/2010	10:03:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/21/2010	10:03:18 PM	Recipe started at 10:03 PM
7/21/2010	10:03:18 PM	Helium valve closed
7/21/2010	10:03:18 PM	H2 valve closed
7/21/2010	10:03:18 PM	BCl3 valve closed
7/21/2010	10:03:18 PM	PH3 valve closed
7/21/2010	10:03:18 PM	SiCl4 pre valve closed
7/21/2010	10:03:18 PM	SiCl4 post valve closed
7/21/2010	10:03:18 PM	Main Vac valve closed
7/21/2010	10:03:18 PM	Bubbler valve closed
7/21/2010	10:03:18 PM	Bypass valve opened
7/21/2010	10:03:18 PM	Helium MFC set to  0.000000
7/21/2010	10:03:18 PM	H2 MFC set to  0.000000
7/21/2010	10:03:18 PM	BCl3 MFC set to  0.000000
7/21/2010	10:03:18 PM	PHl3 MFC set to  0.000000
7/21/2010	10:03:18 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:03:18 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:03:18 PM	Tube furnace set to 0
7/21/2010	10:03:18 PM	Helium valve closed
7/21/2010	10:03:18 PM	H2 valve closed
7/21/2010	10:03:18 PM	BCl3 valve closed
7/21/2010	10:03:18 PM	PH3 valve closed
7/21/2010	10:03:18 PM	SiCl4 pre valve closed
7/21/2010	10:03:18 PM	SiCl4 post valve closed
7/21/2010	10:03:18 PM	Bubbler valve closed
7/21/2010	10:03:18 PM	Main Vac valve opened
7/21/2010	10:03:18 PM	Bypass valve opened
7/21/2010	10:03:18 PM	Helium MFC set to  0.000000
7/21/2010	10:03:18 PM	H2 MFC set to  0.000000
7/21/2010	10:03:18 PM	BCl3 MFC set to  0.000000
7/21/2010	10:03:18 PM	PHl3 MFC set to  0.000000
7/21/2010	10:03:18 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:03:18 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:03:18 PM	Tube furnace set to 0
7/21/2010	10:04:18 PM	H2 valve closed
7/21/2010	10:04:18 PM	BCl3 valve closed
7/21/2010	10:04:18 PM	PH3 valve closed
7/21/2010	10:04:18 PM	SiCl4 pre valve closed
7/21/2010	10:04:18 PM	SiCl4 post valve closed
7/21/2010	10:04:18 PM	Bubbler valve closed
7/21/2010	10:04:18 PM	Helium valve opened
7/21/2010	10:04:18 PM	Main Vac valve opened
7/21/2010	10:04:18 PM	Bypass valve opened
7/21/2010	10:04:18 PM	Helium MFC set to  100.000000
7/21/2010	10:04:18 PM	H2 MFC set to  0.000000
7/21/2010	10:04:18 PM	BCl3 MFC set to  0.000000
7/21/2010	10:04:18 PM	PHl3 MFC set to  0.000000
7/21/2010	10:04:18 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:04:18 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:04:19 PM	Tube furnace set to 0
7/21/2010	10:13:19 PM	Helium valve closed
7/21/2010	10:13:19 PM	H2 valve closed
7/21/2010	10:13:19 PM	BCl3 valve closed
7/21/2010	10:13:19 PM	PH3 valve closed
7/21/2010	10:13:19 PM	SiCl4 pre valve closed
7/21/2010	10:13:19 PM	SiCl4 post valve closed
7/21/2010	10:13:19 PM	Bubbler valve closed
7/21/2010	10:13:19 PM	Main Vac valve opened
7/21/2010	10:13:19 PM	Bypass valve opened
7/21/2010	10:13:19 PM	Helium MFC set to  0.000000
7/21/2010	10:13:19 PM	H2 MFC set to  0.000000
7/21/2010	10:13:19 PM	BCl3 MFC set to  0.000000
7/21/2010	10:13:19 PM	PHl3 MFC set to  0.000000
7/21/2010	10:13:19 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:13:19 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:13:19 PM	Tube furnace set to 0
7/21/2010	10:14:19 PM	H2 valve closed
7/21/2010	10:14:19 PM	BCl3 valve closed
7/21/2010	10:14:19 PM	PH3 valve closed
7/21/2010	10:14:19 PM	SiCl4 pre valve closed
7/21/2010	10:14:19 PM	SiCl4 post valve closed
7/21/2010	10:14:19 PM	Bubbler valve closed
7/21/2010	10:14:19 PM	Helium valve opened
7/21/2010	10:14:19 PM	Main Vac valve opened
7/21/2010	10:14:19 PM	Bypass valve opened
7/21/2010	10:14:19 PM	Helium MFC set to  100.000000
7/21/2010	10:14:19 PM	H2 MFC set to  0.000000
7/21/2010	10:14:19 PM	BCl3 MFC set to  0.000000
7/21/2010	10:14:19 PM	PHl3 MFC set to  0.000000
7/21/2010	10:14:19 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:14:19 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:14:19 PM	Tube furnace set to 0
7/21/2010	10:23:19 PM	Helium valve closed
7/21/2010	10:23:19 PM	H2 valve closed
7/21/2010	10:23:19 PM	BCl3 valve closed
7/21/2010	10:23:19 PM	PH3 valve closed
7/21/2010	10:23:19 PM	SiCl4 pre valve closed
7/21/2010	10:23:19 PM	SiCl4 post valve closed
7/21/2010	10:23:19 PM	Bubbler valve closed
7/21/2010	10:23:19 PM	Main Vac valve opened
7/21/2010	10:23:19 PM	Bypass valve opened
7/21/2010	10:23:19 PM	Helium MFC set to  0.000000
7/21/2010	10:23:19 PM	H2 MFC set to  0.000000
7/21/2010	10:23:19 PM	BCl3 MFC set to  0.000000
7/21/2010	10:23:19 PM	PHl3 MFC set to  0.000000
7/21/2010	10:23:19 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:23:19 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:23:19 PM	Tube furnace set to 0
7/21/2010	10:24:19 PM	H2 valve closed
7/21/2010	10:24:19 PM	BCl3 valve closed
7/21/2010	10:24:19 PM	PH3 valve closed
7/21/2010	10:24:19 PM	SiCl4 pre valve closed
7/21/2010	10:24:19 PM	SiCl4 post valve closed
7/21/2010	10:24:19 PM	Bubbler valve closed
7/21/2010	10:24:19 PM	Helium valve opened
7/21/2010	10:24:19 PM	Main Vac valve opened
7/21/2010	10:24:19 PM	Bypass valve opened
7/21/2010	10:24:19 PM	Helium MFC set to  100.000000
7/21/2010	10:24:19 PM	H2 MFC set to  0.000000
7/21/2010	10:24:19 PM	BCl3 MFC set to  0.000000
7/21/2010	10:24:19 PM	PHl3 MFC set to  0.000000
7/21/2010	10:24:19 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:24:19 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:24:19 PM	Tube furnace set to 0
7/21/2010	10:33:19 PM	Helium valve closed
7/21/2010	10:33:19 PM	H2 valve closed
7/21/2010	10:33:19 PM	BCl3 valve closed
7/21/2010	10:33:19 PM	PH3 valve closed
7/21/2010	10:33:19 PM	SiCl4 pre valve closed
7/21/2010	10:33:19 PM	SiCl4 post valve closed
7/21/2010	10:33:19 PM	Bubbler valve closed
7/21/2010	10:33:19 PM	Main Vac valve opened
7/21/2010	10:33:19 PM	Bypass valve opened
7/21/2010	10:33:20 PM	Helium MFC set to  0.000000
7/21/2010	10:33:20 PM	H2 MFC set to  0.000000
7/21/2010	10:33:20 PM	BCl3 MFC set to  0.000000
7/21/2010	10:33:20 PM	PHl3 MFC set to  0.000000
7/21/2010	10:33:20 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:33:20 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:33:20 PM	Tube furnace set to 0
7/21/2010	10:33:21 PM	Run finished at 10:33 PM
7/21/2010	10:33:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/21/2010	10:38:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/21/2010	10:38:41 PM	Recipe started at 10:38 PM
7/21/2010	10:38:41 PM	Helium valve closed
7/21/2010	10:38:41 PM	H2 valve closed
7/21/2010	10:38:41 PM	BCl3 valve closed
7/21/2010	10:38:41 PM	PH3 valve closed
7/21/2010	10:38:41 PM	SiCl4 pre valve closed
7/21/2010	10:38:41 PM	SiCl4 post valve closed
7/21/2010	10:38:41 PM	Main Vac valve closed
7/21/2010	10:38:41 PM	Bubbler valve closed
7/21/2010	10:38:41 PM	Bypass valve opened
7/21/2010	10:38:41 PM	Helium MFC set to  0.000000
7/21/2010	10:38:41 PM	H2 MFC set to  0.000000
7/21/2010	10:38:41 PM	BCl3 MFC set to  0.000000
7/21/2010	10:38:41 PM	PHl3 MFC set to  0.000000
7/21/2010	10:38:41 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:38:41 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:38:41 PM	Tube furnace set to 0
7/21/2010	10:38:41 PM	Helium valve closed
7/21/2010	10:38:41 PM	H2 valve closed
7/21/2010	10:38:41 PM	BCl3 valve closed
7/21/2010	10:38:41 PM	PH3 valve closed
7/21/2010	10:38:41 PM	SiCl4 pre valve closed
7/21/2010	10:38:41 PM	SiCl4 post valve closed
7/21/2010	10:38:41 PM	Bubbler valve closed
7/21/2010	10:38:41 PM	Main Vac valve opened
7/21/2010	10:38:41 PM	Bypass valve opened
7/21/2010	10:38:41 PM	Helium MFC set to  0.000000
7/21/2010	10:38:41 PM	H2 MFC set to  0.000000
7/21/2010	10:38:41 PM	BCl3 MFC set to  0.000000
7/21/2010	10:38:41 PM	PHl3 MFC set to  0.000000
7/21/2010	10:38:41 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:38:41 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:38:42 PM	Tube furnace set to 0
7/21/2010	10:39:42 PM	H2 valve closed
7/21/2010	10:39:42 PM	BCl3 valve closed
7/21/2010	10:39:42 PM	PH3 valve closed
7/21/2010	10:39:42 PM	SiCl4 pre valve closed
7/21/2010	10:39:42 PM	SiCl4 post valve closed
7/21/2010	10:39:42 PM	Bubbler valve closed
7/21/2010	10:39:42 PM	Helium valve opened
7/21/2010	10:39:42 PM	Main Vac valve opened
7/21/2010	10:39:42 PM	Bypass valve opened
7/21/2010	10:39:42 PM	Helium MFC set to  100.000000
7/21/2010	10:39:42 PM	H2 MFC set to  0.000000
7/21/2010	10:39:42 PM	BCl3 MFC set to  0.000000
7/21/2010	10:39:42 PM	PHl3 MFC set to  0.000000
7/21/2010	10:39:42 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:39:42 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:39:42 PM	Tube furnace set to 0
7/21/2010	10:48:42 PM	Helium valve closed
7/21/2010	10:48:42 PM	H2 valve closed
7/21/2010	10:48:42 PM	BCl3 valve closed
7/21/2010	10:48:42 PM	PH3 valve closed
7/21/2010	10:48:42 PM	SiCl4 pre valve closed
7/21/2010	10:48:42 PM	SiCl4 post valve closed
7/21/2010	10:48:42 PM	Bubbler valve closed
7/21/2010	10:48:42 PM	Main Vac valve opened
7/21/2010	10:48:42 PM	Bypass valve opened
7/21/2010	10:48:42 PM	Helium MFC set to  0.000000
7/21/2010	10:48:42 PM	H2 MFC set to  0.000000
7/21/2010	10:48:42 PM	BCl3 MFC set to  0.000000
7/21/2010	10:48:42 PM	PHl3 MFC set to  0.000000
7/21/2010	10:48:42 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:48:42 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:48:42 PM	Tube furnace set to 0
7/21/2010	10:49:42 PM	H2 valve closed
7/21/2010	10:49:42 PM	BCl3 valve closed
7/21/2010	10:49:42 PM	PH3 valve closed
7/21/2010	10:49:42 PM	SiCl4 pre valve closed
7/21/2010	10:49:42 PM	SiCl4 post valve closed
7/21/2010	10:49:42 PM	Bubbler valve closed
7/21/2010	10:49:42 PM	Helium valve opened
7/21/2010	10:49:42 PM	Main Vac valve opened
7/21/2010	10:49:42 PM	Bypass valve opened
7/21/2010	10:49:42 PM	Helium MFC set to  100.000000
7/21/2010	10:49:42 PM	H2 MFC set to  0.000000
7/21/2010	10:49:42 PM	BCl3 MFC set to  0.000000
7/21/2010	10:49:42 PM	PHl3 MFC set to  0.000000
7/21/2010	10:49:42 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:49:42 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:49:42 PM	Tube furnace set to 0
7/21/2010	10:58:42 PM	Helium valve closed
7/21/2010	10:58:42 PM	H2 valve closed
7/21/2010	10:58:42 PM	BCl3 valve closed
7/21/2010	10:58:42 PM	PH3 valve closed
7/21/2010	10:58:42 PM	SiCl4 pre valve closed
7/21/2010	10:58:42 PM	SiCl4 post valve closed
7/21/2010	10:58:42 PM	Bubbler valve closed
7/21/2010	10:58:42 PM	Main Vac valve opened
7/21/2010	10:58:42 PM	Bypass valve opened
7/21/2010	10:58:42 PM	Helium MFC set to  0.000000
7/21/2010	10:58:42 PM	H2 MFC set to  0.000000
7/21/2010	10:58:42 PM	BCl3 MFC set to  0.000000
7/21/2010	10:58:42 PM	PHl3 MFC set to  0.000000
7/21/2010	10:58:42 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:58:42 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:58:42 PM	Tube furnace set to 0
7/21/2010	10:59:42 PM	H2 valve closed
7/21/2010	10:59:42 PM	BCl3 valve closed
7/21/2010	10:59:42 PM	PH3 valve closed
7/21/2010	10:59:42 PM	SiCl4 pre valve closed
7/21/2010	10:59:42 PM	SiCl4 post valve closed
7/21/2010	10:59:42 PM	Bubbler valve closed
7/21/2010	10:59:42 PM	Helium valve opened
7/21/2010	10:59:42 PM	Main Vac valve opened
7/21/2010	10:59:42 PM	Bypass valve opened
7/21/2010	10:59:42 PM	Helium MFC set to  100.000000
7/21/2010	10:59:42 PM	H2 MFC set to  0.000000
7/21/2010	10:59:42 PM	BCl3 MFC set to  0.000000
7/21/2010	10:59:42 PM	PHl3 MFC set to  0.000000
7/21/2010	10:59:42 PM	SiCl4 MFC set to  0.000000
7/21/2010	10:59:42 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	10:59:42 PM	Tube furnace set to 0
7/21/2010	11:08:43 PM	Helium valve closed
7/21/2010	11:08:43 PM	H2 valve closed
7/21/2010	11:08:43 PM	BCl3 valve closed
7/21/2010	11:08:43 PM	PH3 valve closed
7/21/2010	11:08:43 PM	SiCl4 pre valve closed
7/21/2010	11:08:43 PM	SiCl4 post valve closed
7/21/2010	11:08:43 PM	Bubbler valve closed
7/21/2010	11:08:43 PM	Main Vac valve opened
7/21/2010	11:08:43 PM	Bypass valve opened
7/21/2010	11:08:43 PM	Helium MFC set to  0.000000
7/21/2010	11:08:43 PM	H2 MFC set to  0.000000
7/21/2010	11:08:43 PM	BCl3 MFC set to  0.000000
7/21/2010	11:08:43 PM	PHl3 MFC set to  0.000000
7/21/2010	11:08:43 PM	SiCl4 MFC set to  0.000000
7/21/2010	11:08:43 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:08:43 PM	Tube furnace set to 0
7/21/2010	11:08:44 PM	Run finished at 11:08 PM
7/21/2010	11:08:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/21/2010	11:16:32 PM	Recipe started at 11:16 PM
7/21/2010	11:16:32 PM	Helium valve closed
7/21/2010	11:16:32 PM	BCl3 valve closed
7/21/2010	11:16:32 PM	PH3 valve closed
7/21/2010	11:16:32 PM	SiCl4 pre valve closed
7/21/2010	11:16:32 PM	SiCl4 post valve closed
7/21/2010	11:16:32 PM	Main Vac valve closed
7/21/2010	11:16:32 PM	Bypass valve closed
7/21/2010	11:16:32 PM	Bubbler valve closed
7/21/2010	11:16:32 PM	H2 valve opened
7/21/2010	11:16:32 PM	Helium MFC set to  0.000000
7/21/2010	11:16:32 PM	H2 MFC set to  500.000000
7/21/2010	11:16:32 PM	BCl3 MFC set to  0.000000
7/21/2010	11:16:32 PM	PHl3 MFC set to  0.000000
7/21/2010	11:16:32 PM	SiCl4 MFC set to  0.000000
7/21/2010	11:16:32 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:16:32 PM	Tube furnace set to 0
7/21/2010	11:17:54 PM	Helium valve closed
7/21/2010	11:17:54 PM	BCl3 valve closed
7/21/2010	11:17:54 PM	PH3 valve closed
7/21/2010	11:17:54 PM	SiCl4 pre valve closed
7/21/2010	11:17:54 PM	SiCl4 post valve closed
7/21/2010	11:17:55 PM	Main Vac valve closed
7/21/2010	11:17:55 PM	Bypass valve closed
7/21/2010	11:17:55 PM	H2 valve opened
7/21/2010	11:17:55 PM	Bubbler valve opened
7/21/2010	11:17:55 PM	Helium MFC set to  0.000000
7/21/2010	11:17:55 PM	H2 MFC set to  500.000000
7/21/2010	11:17:55 PM	BCl3 MFC set to  0.000000
7/21/2010	11:17:55 PM	PHl3 MFC set to  0.000000
7/21/2010	11:17:55 PM	SiCl4 MFC set to  0.000000
7/21/2010	11:17:55 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:17:55 PM	Tube furnace set to 1000
7/21/2010	11:37:55 PM	Helium valve closed
7/21/2010	11:37:55 PM	BCl3 valve closed
7/21/2010	11:37:55 PM	Main Vac valve closed
7/21/2010	11:37:55 PM	Bypass valve closed
7/21/2010	11:37:55 PM	H2 valve opened
7/21/2010	11:37:55 PM	PH3 valve opened
7/21/2010	11:37:55 PM	SiCl4 pre valve opened
7/21/2010	11:37:55 PM	SiCl4 post valve opened
7/21/2010	11:37:55 PM	Bubbler valve opened
7/21/2010	11:37:55 PM	Helium MFC set to  0.000000
7/21/2010	11:37:55 PM	H2 MFC set to  500.000000
7/21/2010	11:37:55 PM	BCl3 MFC set to  0.000000
7/21/2010	11:37:55 PM	PHl3 MFC set to  0.600000
7/21/2010	11:37:55 PM	SiCl4 MFC set to  50.000000
7/21/2010	11:37:55 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:37:55 PM	Tube furnace set to 1000
7/21/2010	11:57:55 PM	H2 valve closed
7/21/2010	11:57:55 PM	BCl3 valve closed
7/21/2010	11:57:55 PM	PH3 valve closed
7/21/2010	11:57:55 PM	SiCl4 pre valve closed
7/21/2010	11:57:55 PM	SiCl4 post valve closed
7/21/2010	11:57:55 PM	Main Vac valve closed
7/21/2010	11:57:55 PM	Bypass valve closed
7/21/2010	11:57:55 PM	Helium valve opened
7/21/2010	11:57:55 PM	Bubbler valve opened
7/21/2010	11:57:55 PM	Helium MFC set to  500.000000
7/21/2010	11:57:55 PM	H2 MFC set to  0.000000
7/21/2010	11:57:55 PM	BCl3 MFC set to  0.000000
7/21/2010	11:57:55 PM	PHl3 MFC set to  0.000000
7/21/2010	11:57:55 PM	SiCl4 MFC set to  0.000000
7/21/2010	11:57:55 PM	Bypass solenoid MFC set to  0.000000
7/21/2010	11:57:55 PM	Tube furnace set to 0
